Piezoelectric actuators in micropositioning

Engineering Science and Education Journal

Volumn 10, Issue 1, 2001, Pages 31-36

  Pozzi, Michele ^a   King, Tim ^a  

^a UNIVERSITY OF LEEDS   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MECHATRONICS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; PIEZOELECTRIC DEVICES;

MICROPOSITIONING; PIEZOELECTRIC ACTUATORS;

ENGINEERING RESEARCH;

EID: 0035261924     PISSN: 09637346     EISSN: None     Source Type: Journal    
DOI: 10.1049/esej:20010105     Document Type: Article

References (9)

1. Principle and smart piezoactuators
2. Flexure hinges for piezo-actuator displacement amplifiers: Flexibility, accuracy and stress considerations
3. A piezoelectrically driven wire feeding system for high performance wedge-wedge-bonding machines
4. Precise positioning mechanism utilizing rapid deformations of piezoelectric elements
5. New designs for long range, high resolution, multi-degrees-of-freedom piezoelectric actuators
6. Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezoelectric elements
7. Simple retrofittable long-range x-y translation system for scanned probe microscopes
8. A high speed impact actuator using multilayer piezoelectric ceramics
9. Dynamic characteristics of piezoelectric multilayer stack actuators