Capacitive sensor for micropositioning in two dimensions

Review of Scientific Instruments

Volumn 69, Issue 1, 1998, Pages 310-312

  Kolb, P W ^a,b   Decca, R S ^a,b   Drew, H D ^a,b  

^a LABORATORY FOR PHYSICAL SCIENCES   (United States)

^b Bldg 142   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004094273     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148515     Document Type: Article

References (18)

1. L. A. Bottomley, J. E. Coury, and P. N. First, Anal. Chem. 68, 185R (1996), and references therein; R. Wiesendanger, J. Vac. Sci. Technol. B 12, 515 (1994), and references therein.
2. L. A. Bottomley, J. E. Coury, and P. N. First, Anal. Chem. 68, 185R (1996), and references therein; R. Wiesendanger, J. Vac. Sci. Technol. B 12, 515 (1994), and references therein.
3. D. W. Pohl, Rev. Sci. Instrum. 58, 54 (1986).
4. "Burleigh INCHWORM® Nanopositioning Systems," catalog, Burleigh Instruments, Inc., Burleigh Park, Fishers, NY 14453 (1995).
5. X. Yao et al., J. Vac. Sci. Technol. B 12, 1646 (1994).
6. M. Göken, Rev. Sci. Instrum. 65, 2252 (1994).
7. C. L. Jahncke and H. D. Hallen, Rev. Sci. Instrum. 68, 1759 (1997); R. Curtis, C. Pearson, P. Gaard, and E. Ganz, ibid. 64, 2687 (1993); T. Kato, F. Osaka, I. Tanaka, and S. Ohkouchi, J. Vac. Sci. Technol. B 9, 1981 (1991); K. Ohnishi, M. Umeda, M. Kurosawa, and S. Ueha, J. Electric. Eng. Jpn. 110, 107 (1990).
8. C. L. Jahncke and H. D. Hallen, Rev. Sci. Instrum. 68, 1759 (1997); R. Curtis, C. Pearson, P. Gaard, and E. Ganz, ibid. 64, 2687 (1993); T. Kato, F. Osaka, I. Tanaka, and S. Ohkouchi, J. Vac. Sci. Technol. B 9, 1981 (1991); K. Ohnishi, M. Umeda, M. Kurosawa, and S. Ueha, J. Electric. Eng. Jpn. 110, 107 (1990).
9. C. L. Jahncke and H. D. Hallen, Rev. Sci. Instrum. 68, 1759 (1997); R. Curtis, C. Pearson, P. Gaard, and E. Ganz, ibid. 64, 2687 (1993); T. Kato, F. Osaka, I. Tanaka, and S. Ohkouchi, J. Vac. Sci. Technol. B 9, 1981 (1991); K. Ohnishi, M. Umeda, M. Kurosawa, and S. Ueha, J. Electric. Eng. Jpn. 110, 107 (1990).
10. C. L. Jahncke and H. D. Hallen, Rev. Sci. Instrum. 68, 1759 (1997); R. Curtis, C. Pearson, P. Gaard, and E. Ganz, ibid. 64, 2687 (1993); T. Kato, F. Osaka, I. Tanaka, and S. Ohkouchi, J. Vac. Sci. Technol. B 9, 1981 (1991); K. Ohnishi, M. Umeda, M. Kurosawa, and S. Ueha, J. Electric. Eng. Jpn. 110, 107 (1990).
11. "Differential Variable Reluctance Transducer," brochure, C. J. Enterprises, Tarzana, CA 91357 (unpublished).
12. "Optoelectronic Components Catalog," UDT Sensors, Hawthorne, CA 90250 (unpublished).
13. "Capacitive Sensors," brochure. Physik Instrumente (PI), GmbH & Co., Polytec-Platz 5-7, 76337 Waldbronn, Germany (unpublished).
14. A similar design which uses two split capacitor electrodes, a rotor, and a stator, to measure angular displacement is found in Randall D. Peters, Rev. Sci. Instrum. 63, 3989 (1992). See also Randall D. Peters, ibid. 64, 2256 (1993) and references therein.
15. A similar design which uses two split capacitor electrodes, a rotor, and a stator, to measure angular displacement is found in Randall D. Peters, Rev. Sci. Instrum. 63, 3989 (1992). See also Randall D. Peters, ibid. 64, 2256 (1993) and references therein.
16. Microblock HS, 17AMB 201/LMD, MellesGriot, Irvine, California 92614 (unpublished).
17. OP-27, Analog Devices, One Technology Way, Norwood, MA 02062-9106 (unpublished).
18. There are various other potential sources of nonlinearities. When considered separately, the following causes have their corresponding effects: stray capacitance can affect the zero position, misalignment between the upper electrode, the quadrant axes, and the translational stage in the AV plane introduce quadratic terms, tilting of the quadrant electrode out of parallel with the xy plane of the upper electrode introduce cubic terms. When combined with coupled horizontal-vertical motion of the translation stage, effects may be quite complex.