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Applied Surface Science

Volumn 252, Issue 5, 2005, Pages 1668-1673

Fabrication of self-ordered nanohole arrays on Si by localized anodization and subsequent chemical etching

(3) Asoh, Hidetaka a Oide, Akihiko a Ono, Sachiko a

a KOGAKUIN UNIVERSITY (Japan)

Author keywords

Anodic porous alumina; Anodization; Chemical etching; Nanopatterning

Indexed keywords

ALUMINA; ALUMINUM; ANODIC OXIDATION; ARRAYS; ETCHING; FABRICATION; METALLIC FILMS; SILICA; SILICON;

ANODIC POROUS ALUMINA; ANODIZATION; CHEMICAL ETCHING; NANOPATTERNING;

NANOSTRUCTURED MATERIALS;

EID: 27944483773 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2005.03.146 Document Type: Article

Times cited : (12)

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