A 7-nm nanocolumn structure fabricated by using a ferritin iron-core mask and low-energy Cl neutral beams

Applied Physics Letters

Volumn 84, Issue 9, 2004, Pages 1555-1557

  Kubota, Tomohiro ^a   Baba, Tomohiro ^a   Samukawa, Seiji ^a   Kawashima, Hiroyuki ^b   Uraoka, Yukiharu ^b   Fuyuki, Takashi ^b   Yamashita, Ichiro ^c  

^a TOHOKU UNIVERSITY   (Japan)

^b NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^c PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; ELECTRODES; INDUCTIVELY COUPLED PLASMA; MASKS; NANOTECHNOLOGY; PROTEINS; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOCOLUMN STRUCTURES; NEUTRAL BEAMS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 1642588367     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1655701     Document Type: Article

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