Self-ordered pore structure of anodized aluminum on silicon and pattern transfer

Applied Physics Letters

Volumn 76, Issue 1, 2000, Pages 49-51

  Crouse, D ^a   Lo, Yu Hwa ^a   Miller, A E ^b   Crouse, M ^b  

^a Cornell University   (United States)

^b UNIVERSITY OF NOTRE DAME   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002599865     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125652     Document Type: Article

References (14)

1. F. Keller, M. S. Hunter, and D. L. Robinson, J. Electrochem. Soc. 100, 411 (1953).
2. J. P. O'Sullivan and G. C. Wood, Proc. R. Soc. London, Ser. A 317, 511 (1970).
3. R. E. Ricker, A. E. Miller, D. F. Yue, and G. Banerjee, J. Electron. Mater. 25, 1585 (1996).
4. M. Saito, M. Kirihara, T. Taniguchi, and M. Miyagi, Appl. Phys. Lett. 55, 607 (1989).
5. S. Kawai and R. Ueda, J. Electrochem. Soc. 122, 32 (1975).
6. D. AlMawiawi, N. Coombs, and M. Moskovits, J. Appl. Phys. 70, 4421 (1991).
7. S. Tan, M. Reed, H. Han, and R. Boudreau, in Proceedings of the IEEE Micro Electro Mechanical Systems, Amsterdam, The Netherlands; 29 January-2 February, 1995, pp. 267-272.
8. P. Hoyer, N. Baba, and H. Masuda, Appl. Phys. Lett. 66, 2700 (1995).
9. M. Nakao, S. Oku, T. Tamamura, K. Yasui, and H. Masuda, Jpn. J. Appl. Phys., Part 1 38, 1052 (1999).
10. V. V. Gruzinsky, A. V. Kukhto, and A. M. Mozalev, J. Appl. Spectrosc. 64, 497 (1997).
11. T. P. Hoar and N. F. Mott. J. Phys. Chem. Solids 9, 97 (1959).
12. A. R. Despic, J. Electroanal. Chem. Interfacial Electrochem. 191, 417 (1985).
13. H. Masuda, H. Yamada, M. Satoh, and H. Asoh, Appl. Phys. Lett. 71, 2770 (1997).
14. H. Masuda and K. Fukuda, Science 268, 1466 (1995).