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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 2, 2002, Pages 430-436

Room-temperature fabrication of hard AlN/TiN superlattice coatings by pulsed laser deposition

(3) Pankov, V a Evstigneev, M a Prince, R H a

a YORK UNIVERSITY (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; COATINGS; MICROHARDNESS; MORPHOLOGY; MULTILAYERS; PHASE TRANSITIONS; PULSED LASER DEPOSITION; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

SCANNING PROBE MICROSCOPE (SPM);

SEMICONDUCTOR SUPERLATTICES;

EID: 0036494090 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1448511 Document Type: Article

Times cited : (16)

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