Structure and properties of WC-CrAlN superlattice films by cathodic arc ion plating process

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 414-420

  Lee, Ho Y ^a   Han, Jeon G ^a   Baeg, Seung H ^b   Yang, Se H ^b  

^a Sungkyunkwan University   (South Korea)

^b Adv Consumer Products R and D Ctr   (South Korea)

Author keywords

Superhard; Superlattice; WC CrAlN

Indexed keywords

CHROMIUM COMPOUNDS; CRYSTAL STRUCTURE; HARDNESS; INDENTATION; SUPERLATTICES; TUNGSTEN CARBIDE;

SUPERLATTICE FILMS;

THIN FILMS;

EID: 0037011137     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00813-1     Document Type: Conference Paper

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