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Volumn 1, Issue 1, 2000, Pages 111-120

Design and fabrication of an electrostatic variable gap comb drive in micro-electro-mechanical systems

Author keywords

Boundary element method; Comb drive; Micro electro mechanical systems; Optimal design

Indexed keywords


EID: 0012980327     PISSN: 15261492     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (10)

References (17)
  • 12
    • 0028333279 scopus 로고
    • Scream I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures
    • Shaw, K. A.; Zhang, Z. L.; MacDonald, N. C. (1994): Scream I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures. Sensors and Actuators A, pp. 63-70.
    • (1994) Sensors and Actuators A , pp. 63-70
    • Shaw, K.A.1    Zhang, Z.L.2    MacDonald, N.C.3
  • 15
    • 0032683063 scopus 로고    scopus 로고
    • Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives
    • Ye, W.; Mukherjee, S. (1999): Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives. International Journal for Numerical Methods in Engineering, pp. 175-194.
    • (1999) International Journal for Numerical Methods in Engineering , pp. 175-194
    • Ye, W.1    Mukherjee, S.2
  • 16
    • 0032022531 scopus 로고    scopus 로고
    • Optimal shape design of an electrostatic comb drive in microelectromechanical systems
    • Ye, W.; Mukherjee, S.; MacDonald, N. (1998): Optimal shape design of an electrostatic comb drive in microelectromechanical systems. Journal of Microelectromechanical Systems, pp. 16-26.
    • (1998) Journal of Microelectromechanical Systems , pp. 16-26
    • Ye, W.1    Mukherjee, S.2    MacDonald, N.3
  • 17
    • 0026997981 scopus 로고
    • Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry
    • Hilton Head, SC
    • Yun, W.; Howe, R. T.; Gray, P. R. (1992): Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry. In Tech. Dig. IEEE Solid-State Sensor and Actuator Workshop, pp. 126-131, Hilton Head, SC.
    • (1992) Tech. Dig. IEEE Solid-State Sensor and Actuator Workshop , pp. 126-131
    • Yun, W.1    Howe, R.T.2    Gray, P.R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.