Design and fabrication of an electrostatic variable gap comb drive in micro-electro-mechanical systems

CMES - Computer Modeling in Engineering and Sciences

Volumn 1, Issue 1, 2000, Pages 111-120

  Ye, Wenjing ^a   Mukherjee, Subrata ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Department of Molecular Biology and Genetics   (United States)

Author keywords

Boundary element method; Comb drive; Micro electro mechanical systems; Optimal design

Indexed keywords

EID: 0012980327     PISSN: 15261492     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)

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