On the optimization of ultra low power front-end interfaces for capacitive sensors

Sensors and Actuators, A: Physical

Volumn 117, Issue 2, 2005, Pages 273-285

  Bracke, W ^a,b   Merken, P ^a   Puers, R ^b   Van Hoof, C ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Capacitance to voltage converter; Capacitive sensors; Continuous time sigma delta modulator; Generic sensor interface; Low power

Indexed keywords

CAPACITANCE TO VOLTAGE CONVERTERS; CAPACITIVE SENSORS; CONTINUOUS TIME SIGMA DELTA MODULATORS; GENERIC SENSOR INTERFACES;

CAPACITANCE; CAPACITORS; DELTA SIGMA MODULATION; ELECTRIC SWITCHES; ITERATIVE METHODS; POWER CONVERTERS; PRODUCT DESIGN; VOLTAGE CONTROL;

SENSORS;

EID: 26844460048     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.06.011     Document Type: Article

References (42)

1. B. Warneke, M. Last, B. Liebowitz, K.S.J. Pister, Smart dust: communicating with a cubic millimeter computer, IEEE Comput. Mag. 34 (1) (2001) 44-51.
2. W. Claes, W. Sansen, R. Puers, A 40 μA/channel compensated 18-channel strain gauge measurement system for stress monitoring in dental implants, IEEE JSSC 37 (3) (2002) 293-300.
3. C. Grimes, M. Jain, R.S. Singh, Q. Cai, A. Mason, K. Takahata, Y. Gianchandani, Magnetoelastic microsensors for environmental monitoring, in: Proceedings of the 14th IEEE International Conference on Micro Electromechanical Systems, Interlaken, Switzerland, 21-25 January 2001, pp. 278-281.
4. A. Bakker, J.H. Huijsing, Micropower CMOS temperature sensor with digital output, IEEE JSSC 31 (7) (1996) 933-937.
5. F.M.L. Van Der Goes, G.C.M. Meijer, A universal transducer interface for capacitive and resistive sensor elements, Analog Integr. Circuits Signal Process. 14 (1997) 249-260.
6. A. Mason, N. Yazdi, A.V. Chavan, K. Najafi, K.D. Wise, A generic multielement microsystem for portable wireless applications, Proceedings of the IEEE 86 (8) (1998) 1733-1746.
7. N. Yazdi, A. Mason, K. Najafi, K.D. Wise, A generic interface chip for capacitive sensors in low-power multi-parameter microsystems, Sens. Actuators A 84 (2000) 351-361.
8. R. Puers, Capacitive sensors: when and how to use them, Sens. Actuators A 37-38 (1993) 93-105.
9. R. Puers, P. Wouters, Adaptable interface circuits for flexible monitoring of temperature and movement, Analog Integr. Circuits Signal Process. 14 (1997) 193-206.
10. R. Puers, M. Catrysse, G. Vandevoorde, R.J. Collier, E. Louridas, F. Burny, M. Donkerwolcke, F. Moulart, A telemetry system for the detection of hip prosthesis loosening by vibration analysis, Sens. Actuators 85 (2000) 42-47.
11. D. Lapadatu, M. De Cooman, R. Puers, A double-sided capacitive miniaturized accelerometer based on photovoltaic etch-stop technique, Sens. Actuators A 53 (1996) 261-266.
12. N. Yazdi, K. Najafi, A high-sensitivity silicon accelerometer with a folded-electrode structure, IEEE J. Microelectromech. Syst. 12 (4) (2003) 479-486.
13. A. Selvakumar, K. Najafi, A high-sensitivity Z-axis capacitive silicon microaccelerometer with a torsional suspension, IEEE J. Microelectromech. Syst. 7 (2) (1997) 192-200.
14. H. Seidel, H. Riedel, R. Kolbeck, G. Mück, W. Küpke, M. Königer, Capacitive silicon accelerometer with highly symmetrical design, Sens. Actuators A21-A23 (1990) 312-315.
15. F.E.H. Tay, J. Xu, V.J. Logeeswaran, A differential capacitive low-g microaccelerometer with mg resolution, Sens. Actuators A 86 (2000) 45-51.
16. R. Puers, E. Peeters, A. Van Den Bossche, W. Sansen, A capacitive pressure sensor with low impedance output and active suppression of parasitic effects, Sens. Actuators A21-A23 (1990) 108-114.
17. D. De Bruyker, Ph.D. Dissertation, Intelligent Silicon Pressure Sensors, KU Leuven, 2002.
18. A.V. Chavan, K.D. Wise, A monolithic fully integrated vacuum sealed CMOS pressure sensor, IEEE Trans. Electron. Devices 49 (1) (2002) 164-169.
19. S. Chatzandroulis, D. Tsoulakas, P.A. Neukomm, A miniature pressure system with a capacitive sensor and a passive telemetry link for use in implantable applications, IEEE J. Microelectromech. Syst. 9 (1) (2000) 18-23.
20. T. Eggers, C. Marschner, B. Clasbrummel, R. Laur, J. Binder, K. Takahata, Y. Gianchandani, Advanced hybrid integrated low-power telemetric pressure monitoring system for biomedical applications, in: Proceedings of the 13th IEEE International Conference on Micro Electromechanical Systems, Miyazaki, Japan, 23-27 January 2000, pp. 329-334.
21. U. Kang, K.D. Wise, A high-speed capacitive humidity sensor with on-chip thermal reset, IEEE Trans. Electron. Devices 47 (4) (2000) 702-710.
22. J. Laconte, V. Wilmart, J.-P. Raskin, D. Flandre, High-sensitivity capacitive humidity sensor using 3-layer patterned polyimide sensing film, in: Proceedings of the IEEE Sensors 2003, Toronto, Canada, 22-24 October, 2003, pp. 106-107.
23. G.C.M. Meijer, X. Li, Smart sensor interface electronics, in: Proceedings of the 23rd International Conference on Microelectronics MIEL '02, Nis, Yugoslavia, 12-15 May, 2002, pp. 106-107.
24. F.R. Riedijk, Ph.D. Dissertation, Integrated Smart Sensors with Digital Bus Interface, TU Delft, 1993.
25. M. Lemkin, B. Boser, A three axis micromachined accelerometer with a CMOS position sense interface and digital offset trim electronics, IEEE JSSC 34 (4) (1999) 456-468.
26. B. Wang, T. Kajita, T. Sun, G. Temes, High accuracy circuits for on-chip capacitive ratio testing and sensor readout, IEEE Trans. Instrum. Meas. 47 (1) (1998) 16-20.
27. H. Kulah, N. Yazdi, K. Najafi, A CMOS switched-capacitor interface circuit for an integrated accelerometer, in: Proceedings of the 43rd IEEE Midwest Symposium on Circuits and Systems, Lansing, MI, 8-11 August 2000, pp. 244-247.
28. X. Li, G.C. Meijer, Elimination of shunting conductance effects in a low cost capacitive sensor interface, IEEE Trans. Instrum. Meas. 49 (2000) 531-534.
29. X. Li, G.C. Meijer, An accurate interface for capacitive sensors, IEEE Trans. Instrum. Meas. 51 (5) (2002) 935-939.
30. R. Harjani, R. Heineke, F. Wang, An integrated low-voltage class AB CMOS OTA, IEEE JSSC 34 (2) (1999) 134-142.
31. M. Bao, H. Yang, H. Yin, S. Shen, Effects of electrostatic forces generated by the driving signal on capacitive sensing devices, Sens. Actuators. A84 (2000) 213-219.
32. R. Puers, D. Lapadatu, Electrostatic forces and their effects on capacitive mechanical sensors, Sens. Actuators A 56 (1996) 203-210.
33. K. Martin, L. Oczolak, Y.S. Lee, G.C. Ternes, A differential switched-capacitor amplifier, IEEE JSSC SC-22 (1) (1987) 104-106.
34. B.E. Boser, B.A. Wooley, The design of sigma-delta modulation analog-to-digital converters, IEEE JSSC 23 (6) (1988) 1298-1308.
35. P.G.A. Jespers, Integrated Converters: D to A and A to D Architectures, Analysis and Simulation, Oxford University Press, 2000 (Chapter 7).
36. R. Adams, Design and implementation of an audio 18 bit analog-to-digital converter using oversampling techniques, J. Audio Eng. Soc. (1986) 153-166.
37. O. Feely, L.O. Chua, The effect of integrator leak in Σ-Δ modulation, IEEE Trans. Circuits Syst. 38 (1991) 1293-1305.
38. J.A. Cherry, W.M. Snelgrove, Clock jitter and quantizer metastability in continuous-time sigma-delta modulators, IEEE Trans, Circuits Syst. II: Analog Digital Signal Process. 46 (6) (1999) 661-676.
39. T. Kwan, K. Martin, An adaptive analog continuous time CMOS biquadratic filter, IEEE JSSC 26 (1991) 859-867.
40. V. Peluso, P. Vancorenland, A.M. Marques, M.S.J. Steyaert, W. Sansen, A 900 mV low-power ΣΔ A/D converter with 77 dB dynamic range, IEEE JSSC 33 (12) (1998) 1887-1897.
41. F. You, S.H.K. Embabi, E. Sánchez-Sinencio, Low-voltage class AB buffers with quiescent current control, IEEE JSSC 33 (6) (1998) 915-920.
42. C.A. Gobet, A. Knob, Noise analysis of switched capacitor networks, IEEE Trans. Circuits Syst. CAS-30 (1) (1983) 37-43.