A generic multielement microsystem for portable wireless applications

Proceedings of the IEEE

Volumn 86, Issue 8, 1998, Pages 1733-1746

  Mason, Andrew ^a   Yazdi, Navid ^a   Chavan, Abhijeet V ^a   Najafi, Khalil ^a   Kensall, D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Compensation; Measurement system; Microelectromechanical devices; Microelectromechanical system; Microsensor; Microsystem; Power management; Transducer. 1998 ieee

Indexed keywords

ACCELERATION MEASUREMENT; ACTUATORS; ATMOSPHERIC HUMIDITY; DATA PROCESSING; INTERFACES (COMPUTER); MONITORING; PRESSURE MEASUREMENT; RADIO; RADIO TRANSMITTERS; SENSORS; TEMPERATURE MEASUREMENT; TRANSDUCERS;

GENERIC MULTIELEMENT MICROSYSTEM; INTRAMODULE SENSOR BUS; MICROCONTROLLER; POWER MANAGEMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0032138949     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.704279     Document Type: Article

References (55)

1. J. H. Huijsing, "Integrated smart sensors," Sensors Actuators A, vol. 30, nos. 1/2, pp. 167-174, 1992.
2. K. D. Wise, "Microelectromechanical systems: Interfacing electronics to a nonelectronic world," in Dig. IEEE Int. Electron Device Meeting, Dec. 1996, pp. 11-18.
3. J. Bryzek, "MEMS: A closer look," Sensors Mag., pp. 4-9, July 1996.
4. L. Spangler and C. J. Kemp, "A smart automotive accelerometer with on-chip airbag deployment circuits," in Dig. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 1996, pp. 211-214.
5. H. Baltes, H. Haberli, P. Malcovati, and F. Maloberti, "Smart sensor interfaces," in Dig. IEEE Int. Symp. Circuits and Systems, Atlanta, GA, May 1996, vol. 4, pp. 380-383.
6. E. Yoon and K. D. Wise, "An integrated mass flow sensor with on-chip CMOS interface circuitry," IEEE Trans. Electron Devices, vol. 39, pp. 1376-1386, June 1992.
7. S. Middlehoek and S. A. Audet, Silicon Sensors. London, UK: Academic, 1989.
8. K. D. Wise, "Integrated microsystems: Device and technology challenges," in Proc. Eur. Solid-State Device Res. Conf. (ESSDERC), The Hague, The Netherlands, Sept. 1995, pp. 15-24.
9. A. Mason, N. Yazdi, K. Najafi, and K. Wise, "A low-power wireless microinstrumentation system for environmental monitoring," in Dig. Int. Conf. Sensors and Actuators (Transducers'95), Stockholm, Sweden, June 1995, pp. 107-110.
10. B. J. Hosticka, "CMOS sensor systems," in Dig. Int. Conf. Solid-Stale Sensors and Actuators (Transducers'97), Chicago, IL, June 1997, pp. 991-993.
11. K. D. Wise, "Integrated microinstrumentation systems: Smart peripherals for distributed sensing and control," in Dig. IEEE Int. Solid-State Circ. Conf., San Francisco, CA, Feb. 1993, pp. 126-127.
12. C. J. Koomen, 'Technologies for the multimedia city," in Proc. European Solid-State Device Research Conf. (ESSDERC), The Hague, The Netherlands, Sept. 1995, pp. 25-36.
13. J. E. Brignell, "Sensors in distributed instrumentation systems," Sensors Actuators, vol. 10, nos. 3/4, pp. 249-261, 1986.
14. K. D. Wise, "Device and technology challenges for integrated sensors," in IEEE Device Research Conf., Charlottesville, VA, June 1995.
15. K. D. Wise and N. Najafi, "The coming opportunities in microsensor systems," in Digest, IEEE Int. Conf. Solid-State Sensors and Actuators (Transducers'91), San Francisco, CA, June 1991, pp. 2-7, invited.
16. K. M. Mahmoud, R. P. van Kampen, M. J. Rutka, and R. F. Wolffenbuttel, "A silicon integrated smart pressure sensor," in Dig. Int. Conf. Solid-State Sensors and Actuators (Transducers'93), Yokohama, Japan, June 1993, pp. 217-220.
17. 2C bus interface based on thermal sigma-delta modulation," in Dig. Int. Conf. Solid-Stale Sensors and Actuators (Transducers'93), Yokohama, Japan, June 1993, pp. 792-795.
18. "MC68HC11E9 (HCMOS microcontroller unit) technical data manual," Motorola, Inc., Phoenix, AZ, 1991.
19. A. Chandrakasan, S. Sheng, and R. W. Brodersen, "Low-power CMOS digital design," IEEE J. Solid-Stale Circuits, vol. 27, pp. 473-484, Apr. 1992.
20. J. D. Meindl, "Low power microelectronics: Retrospect and prospect," Proc. IEEE, vol. 83, pp. 619-635, Apr. 1995.
21. A. A. Abidi, "Low-power radio-frequency IC's for portable communications," Proc. IEEE, vol. 83, pp. 544-569, Apr. 1995.
22. B. Davari, R. H. Dennard, and G. G. Shahidi, "CMOS scaling for high performance and low power-The next ten years," Proc. IEEE, vol. 83, pp. 595-606, Apr. 1995.
23. R. A. Powers, "Batteries for low power electronics," Proc. IEEE, vol. 83, pp. 687-693, Apr. 1995.
24. P. B. Koeneman, I. J. Busch-Vishniac, and K. L. Wood, "Feasibility of micro power supplies for MEMS," J. Microelect romech. Syst., vol. 6, no. 4, pp. 355-362, pec. 1997.
25. L. E. Larson, RF and Microwave Circuit Design for Wireless Communications. Norwood, MA: Artech House, 1996.
26. C. T.-C. Nguyen, L. P. B. Katehi, and G. M. Rebeiz, "Micromachined devices for wireless communications," Proc. IEEE, this issue, pp. 1756-1768.
27. K. Bult, A. Burstein, D. Chang, M. Dong, M. Fielding, E. Kruglick, J. Ho, F. Lin, T. H. Lin, W. J. Kaiser, R. Murkai, P. Nelson, F. L. Newburg, K. S. J. Pister, G. Pottie, H. Sanchez, O. M. Stafsudd, K. B. Tan, C. M. Ward, G. Yung, S. Xue, H. Marcy, and J. Yao, "Wireless integrated microsensors," in Dig. Solid-Slate Sensor and Actuator Workshop, Hilton Head, SC, June 1996, pp. 205-210.
28. A. Kompolt and J. Brewer, "Designing a wristwatch pager creates its own special challenges," Wireless Syst. Design, pp. 37-41, Mar. 1997.
29. J. R. Moyne, N. Najafi, D. Judd, and A. Stock, "Analysis of sensor/actuator bus interoperability standard alternatives for semiconductor manufacturing," in Proc. Sensors Expo, Cleveland, OH, Sept. 1994, pp. 375-386.
30. N. Najafi and K. D. Wise, "An organization and interface for sensor-driven semiconductor process control systems," IEEE Trans. Semiconduct. Mamifact., vol. 3, pp. 230-238, Nov. 1990.
31. S. P. Woods, "The IEEE-P1451 transducer to microprocessor interface," Sensors Mag., pp. 43-48, June 1996.
32. L. H. Eccles, "A brief description of IEEE P1451.2," in Proc. Sensors Expo, Detroit, MI, Oct. 1997, pp. 81-90.
33. K. Watanabe and W. S. Chung, "A switched capacitor interface for intelligent capacitive transducers," IEEE Trans. Iustrum. Meas., vol. IM-35, pp. 472-476, Dec. 1986.
34. Y. E. Park and K. D. Wise, "An MOS switched-capacitor readout amplifier for capacitive pressure sensors," in Proc. IEEE Custom Integrated Circuits Conf., May 1983, pp. 380-384.
35. Y. Cao and G. C. Ternes, "High-accuracy circuits for onchip capacitance ratio testing or sensor readout," IEEE Trans. Circuits Syst. II, vol. 41, pp. 637-639, Sept. 1994.
36. S. L. Garverick, M. L. Nagy, N. K. Rao, D. K. Hartsfield, and A. Purushotham, "A capacitive sensing integrated circuit for detection of micromotor critical angles," IEEE J. Solid-State Circuits, vol. 32, pp. 23-30, Jan. 1997.
37. CSEM2003 (capacitive sensor interface with gain and offset adjustment) data sheet, Centre Suisse d'Electronique et de Microtechnique SA, Neuchatel, Switzerland, 1995.
38. ISC721 (capacitive sensor interface circuit) preliminary data sheet, Irvine Sensors Corporation, Irvine, CA, 1997.
39. N. Yazdi, A. Mason, K. Najafi, and K. Wise, "A low-power generic interface circuit for capacitive sensors," in Dig. SolidStale Sensor and Actuator Workshop, Hilton Head Island, SC, June 1996, pp. 215-218.
40. E. Vittoz and O. Neyroud, "A low-voltage CMOS bandgap reference," IEEE J. Solid-State Circuits, vol. SC-14, pp. 573-577, June 1979.
41. G. C. M. Meijer, "Thermal sensors based on transistors," Sensors Actuators, vol. 10, pp. 103-125, 1986.
42. Y. Zhang and K. D. Wise, "A high-accuracy multi-element silicon barometric pressure sensor," in Dig. Int. Conf. Sensors and Actuators (Transducer'95), Stockholm, Sweden, June 1995, pp. 608-611.
43. A. V. Chavan, and K. D. Wise, "A batch-processed vacuumsealed capacitive pressure sensor," in Dig. Int. Conf. Solid-State Sensors and Actuators (Transducers'97), Chicago, IL, June 1997, pp. 1449-1452.
44. A. B. Frazier and M. G. Allen, "Metallic microstructures fabricated using photosensitive polyimide electroplating molds," IEEE J. Microelectroinech. Syst., vol. 2, pp. 87-94, 1993.
45. N. Yamazoe, "Humidity sensors: Principles and applications," Sensors Actuators, vol. 10, pp. 379-398, 1986.
46. A. Selvakumar, F. Ayazi, and K. Najafi, "A high sensitivity Zaxis torsional silicon accelerometer," in Dig. IEEE Int. Electron Device Meeting, San Francisco, CA, Dec. 1996, pp. 765768.
47. Y. Gianchandani and K. Najafi, "A bulk silicon dissolved wafer process for microelectromechanical devices," J. Microelectroinech. Syst., vol. 1, no. 3, pp. 77-85, June 1992.
48. A. Selvakumar, N. Yazdi, and K. Najafi, "A low power, wide range threshold acceleration sensing system," in Proc. IEEE Microelectroinech. Syst. Workshop (MEMS 96), San Diego, CA, Feb. 1996, pp. 186-191.
49. O. Machul, D. Hammerschmidt, W. Brockherde, B. J. Hosticka, E. Obermeier, and P. Krause, "A smart pressure transducer with on-chip readout, calibration and nonlinear temperature compensation based on spline-functions," in Dig. IEEE Int. Solid-State Circ. Conf., Feb. 1997, pp. 198-199.
50. J. A. Lloyd, H.-S. Lee, L. Parameswaran, M. A. Schmidt, and C. G. Sodini, "An adaptive calibration technique for micromachined pressure sensors," in Dig. Int. Conf. Solid-State Sensors and Actuators (Transducers'97), Chicago, IL, June 1997, pp. 295-298.
51. J. Bryzek, "Modeling sensor performance for smart transducers," in Proc. Sensors Expo, Cleveland, OH, Sept. 1994, pp. 501-507.
52. X. Li, G. C. M. Meijer, and G. W. de Jong, "A self-calibration technique for a smart capacitive angular-position sensor," in IEEE Instnun, Meas. Tech. Conf., Brussels, Belgium, June 1996, pp. 774-777.
53. P. T. P. Tang, "Table-lookup algorithms for elementary functions and their error analysis," in Proc. IEEE Symp. Computer Arithmetic, June 1991, pp. 232-236.
54. S. B. Crary, W. G. Baer, J. C. Cowles, and K. D. Wise, "Digital compensation of high-performance silicon-pressure transducers," Sensors Actuators, vol. A21-A23, pp. 70-72, 1990.
55. Y. Yoshii, A. Nakajo, H. Abe, K. Ninomiya, H. Miyashita, N. Sakuri, M. Kosuge, and S. Hao, "1 chip integrated software calibrated CMOS pressure sensor with MCU, A/D convenor, D/A convenor, digital communication port, signal conditioning circuit and temperature sensor," in Dig. Int. Conf. on SolidState Sensors and Actuators (Transducers'97), Chicago, IL, June 1997, pp. 1485-1488.