A monolithic fully-integrated vacuum-sealed CMOS pressure sensor

IEEE Transactions on Electron Devices

Volumn 49, Issue 1, 2002, Pages 164-169

  Chavan, Abhijeet V ^a,b,c   Wise, Kensall D ^a,b,c  

^a IEEE   (United States)

^b Delphi Delco Electronic Systems Corporation   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Capacitive; CMOS readout; Integrated sensors; MEMS; Monolithic; Pressure; Vacuum sealing

Indexed keywords

ANODIC BONDING; BAROMETRIC PRESSURE SENSOR; HERMETIC LEAD TRANSFER; INTEGRATED SENSOR; SWITCHED CAPACITOR READOUT CIRCUIT; VACUUM SEALING;

CAPACITORS; CHEMICAL MECHANICAL POLISHING; CMOS INTEGRATED CIRCUITS; POLYSILICON; PRESSURE TRANSDUCERS; SENSORS; SILICON WAFERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036255968     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.974763     Document Type: Article

References (11)

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