A double-sided capacitive miniaturized accelerometer based on photovoltaic etch-stop technique

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 261-266

  Lapadatu, Daniel ^a   De Cooman, Michel ^a   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Capacitive accelerometers; Photovoltaic etch stop technique

Indexed keywords

EID: 0342504144     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01153-3     Document Type: Article

References (8)

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