Sims study of Ti-Zr-V NEG thermal activation process

Vacuum

Volumn 80, Issue 1-3, 2005, Pages 47-52

  Drbohlav, J ^a   Matolinova I ^a   Masek K ^a   Matolin V ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Alloy; Coating; Dynamic SIMS; Getter; NEG; Static SIMS; Thermal activation; Titanium; Vanadium; Zirconium

Indexed keywords

ALLOYS; COATINGS; MAGNETRON SPUTTERING; STAINLESS STEEL; SUBSTRATES; THERMOANALYSIS; TITANIUM; VANADIUM; ZIRCONIUM;

DYNAMIC SIMS; NEG; STATIC SIMS; THERMAL ACTIVATION;

EVAPORATORS;

EID: 25444532755     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.07.016     Document Type: Conference Paper

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