Novel route to extreme vacua: the non-evaporable getter thin film coatings

Vacuum

Volumn 53, Issue 1-2, 1999, Pages 219-225

  Benvenuti, C ^a   Cazeneuve, J M ^a   Chiggiato, P ^a   Cicoira, F ^a,c   Santana, A Escudeiro ^a   Johanek, V ^a   Ruzinov, V ^a,d   Fraxedas, J ^b  

^a CERN   (Switzerland)

^b CSIC   (Spain)

^c EPFL   (Switzerland)

^d NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY MISIS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYS; COATINGS; HAFNIUM; PRESSURE MEASUREMENT; TERNARY SYSTEMS; THIN FILMS; TITANIUM; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM;

ELECTRON STIMULATED DESORPTION; PUMPING SPEED;

VACUUM PUMPS;

EID: 0033132919     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00377-7     Document Type: Article

References (12)

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