X-ray photoelectron spectroscopy and static secondary ion mass spectroscopy study of activation mechanism of Zr-V low activation temperature nonevaporable getter films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 3, 2003, Pages 797-805

  Mašek, Karel ^a   Šutara, František ^a   Skála, Tomáš ^a   Drbohlav, Jiří ^a   Veltruská, Kateřina ^a   Matolín, Vladimír ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CARBIDES; CARBON; CHEMICAL ACTIVATION; ELECTRON ENERGY LOSS SPECTROSCOPY; HYDROGEN; MOLECULAR BEAMS; SECONDARY ION MASS SPECTROMETRY; STAINLESS STEEL; STOICHIOMETRY; SUBSTRATES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

HYDRIDE GROUP; HYDROXYL GROUP; OXIDE STOICHIOMETRY; STATIC SECONDARY ION MASS SPECTROSCOPY; SUPERFICIAL OXIDE LAYER; THERMAL ACTIVATION; ZIRCONIUM-VANADIUM ALLOY;

ZIRCONIUM ALLOYS;

EID: 0037665288     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1562175     Document Type: Article

References (38)

1. C. Benvenuti, P. Chiggiato, F. Cicoira, and V. Ruzinov, Vacuum 50, 57 (1998).
2. P. della Porta, Vacuum 47, 771 (1996).
3. R. M. Caloi and C. Carreti, J. Vac. Sci. Technol. A 16, 1991 (1998).
4. A. Pozzo, C. Boffito, and F. Mazza, Vacuum 47, 783 (1996).
5. Y. Li, D. Hess, R. Kersevan, and N. Mistry, J. Vac. Sci. Technol. A 16, 1139 (1998).
6. R. Giannantonio, M. Succi, and C. Solcia, J. Vac. Sci. Technol. A 15, 187 (1997).
7. R. Giannantonio, P. Manini, F. Mazza, and D. Dominoni, J. Vac. Sci. Technol. A 17, 2093 (1999).
8. D. J. Wang, J. R. Chen, and Y. C. Liu, J. Vac. Sci. Technol. A 14, 2624 (1996).
9. C. Benvenuti and P. Chiggiato, J. Vac. Sci. Technol. A 14, 3278 (1996).
10. C. Benvenuti, J. M. Cazeneuve, P. Chiggiato, F. Cicoira, A. Escuderio Santana, V. Johánek, V. Ruzinov, and J. Fraxedas, Vacuum 53, 219 (1999).
11. A. E. Prodromides, C. Scheuerlin, and M. Taborelli, Vacuum 60, 35 (2001).
12. B. Henrist, N. Hilleret, C. Scheuerlein, and M. Taborelli, Appl. Surf. Sci. 172, 95 (2001).
13. M. P. Lozano and J. Fraxedas, Surf. Interface Anal. 30, 623 (2000).
14. F. Šutara, N. Tsud, K. Veltruská, and V. Matolín, Vacuum 61, 135 (2001).
15. V. Matolín and V. Johánek, Vacuum 67, 177 (2002).
16. Y. S. Li, P. C. Wong, and K. A. R. Mitchell, Appl. Surf. Sci. 89, 263 (1995).
17. Z. Song, X. Bao, U. Wild, M. Muhler, and G. Ertl, Appl. Surf. Sci. 134, 31 (1998).
18. C. D. Wagner, W. M. Riggs, L. E. Davis, and J. F. Moulder, Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer Corporation, Physical Electronics Division, Eden Prairie, MN).
19. G. Hopfengartner, D. Borgman, I. Rademacher, G. Wedler, E. Hums, and G. W. Spitznagel, J. Electron Spectrosc. Relat. Phenom. 63, 91 (1993).
20. M. Sancrotti, G. Trezzi, and P. Manini, J. Vac. Sci. Technol. A 9, 182 (1991).
21. S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Interface Anal. 11, 577 (1988).
22. T. Koch and P. Ziemann, Thin Solid Films 303, 122 (1997).
23. D. V. McComb, Phys. Rev. B 54, 7094 (1996).
24. M. Bowker, P. D. A. Pudney, and C. J. Barnes, J. Vac. Sci. Technol. A 8, 816 (1990).
25. G. Ertl, Surf. Sci. 89, 525 (1979).
26. I. Stará and V. Matolín, Surf. Sci. 313, 99 (1994).
27. A. Brown and J. C. Vickerman, Surf. Sci. 124, 267 (1983).
28. A. Brown and J. C. Vickerman, Surf. Sci. 151, 319 (1985).
29. V. Matolín, E. Gillet, N. M. Reed, and J. Vickerman, J. Chem. Soc. Faraday Trans. 86, 2749 (1990).
30. V. Matolín, M. Rebholz, and N. Kruse, Surf. Sci. 245, 233 (1991).
31. M. A. Henderson, Surf. Sci. Lett. 343, L1156 (1995).
32. R. M. van Hardeveld, R. A. van Santen, and J. W. Niemantsverdrriet, Surf. Sci. 369, 23 (1996).
33. H. Kitaoka, K. Ozawa, K. Edamoto, and S. Otani, Solid State Commun. 118, 23 (2001).
34. C. O. de Gonzalez and E. A. Garcia, Surf. Sci. 193, 305 (1988).
35. R. Zimmermann, R. Claessen, F. Reinert, P. Steiner, and S. Hufner, J. Phys.: Condens. Matter 10, 5697 (1998).
36. J. Meldialdua, R. Casanova, and Y. Barbaux, J. Electron Spectrosc. Relat. Phenom. 71, 249 (1995).
37. Z. Zhang and V. E. Henrich, Surf. Sci. 321, 133 (1994).
38. K. L. Hakansson, H. I. P. Johansson, and L. I. Johansson, Phys. Rev. B 48, 2623 (1993).