Decreasing surface outgassing by thin film getter coatings

Vacuum

Volumn 50, Issue 1-2, 1998, Pages 57-63

  Benvenuti, C ^a   Chiggiato, P ^a   Cicoira, F ^a   Ruzinov, V ^a,b  

^a CERN   (Switzerland)

^b NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY MISIS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

DEGASSING; DESORPTION; ION BOMBARDMENT; MATERIALS TESTING; PRESSURE MEASUREMENT; SPUTTER DEPOSITION; STAINLESS STEEL; SURFACE PHENOMENA; TEMPERATURE; THIN FILMS; ULTRAVIOLET RADIATION; VACUUM DEPOSITED COATINGS;

ACTIVATION TEMPERATURE; ELECTRON STIMULATED DESORPTION; IN SITU BAKING; SURFACE OUTGASSING; THIN FILM GETTER COATINGS;

GETTERS;

EID: 0032058258     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00017-7     Document Type: Article

References (8)

1. Benvenuti, C., Physica Scripta, 1988, T22, 48.
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4. Benvenuti, C., Chiggiato, P., Cicoira, F. and L'Aminot, J.CERN Internal Note EST-SM 97-01.
5. Benvenuti, C. and Hauer, M., in Proceedings of the 8th International Vacuum Congress, Vol. 2, Supplément à la revue "Le Vide, les couches minces", No. 201, p. 199.
6. Nakajama, T., Shoji, F. and Yagi, E., Trans. JIM, 1964, 5, 231.
7. Halley-Demoulin, I., Oxydation d'Alliage Titane-Zirconium, PhD Thesis, Université de Bourgogne (Dijon, France), 1992.
8. Benvenuti, C. and Chiggiato, P., Vacuum, 1993, 44, 511.