Experience with the use of a turbomolecular pump combined with a NEG pump in UHV conditions

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 783-786

  Pozzo, A ^a   Boffito, C ^b   Mazza, F ^b  

^a INFN SEZIONE DI GENOVA   (Italy)

^b SAES GETTERS S P A   (Italy)

Author keywords

Getter pump; Getters; NEG; Turbomolecular pump

Indexed keywords

COMPOSITION; GASES; GETTERS; HIGH PRESSURE EFFECTS; HYDROGEN; PRESSURE;

GETTER PUMP; NONEVAPORABLE GETTER; RESIDUAL GAS COMPOSITION; TEST CHAMBER; TURBOMOLECULAR PUMPS; ULTRAHIGH VACUUM CONDITIONS; VACUUM SYSTEMS;

VACUUM PUMPS;

EID: 0030167780     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00066-8     Document Type: Article

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