XPS and ESD study of carbon and oxygen chemistry on TiZrV NEG

Vacuum

Volumn 61, Issue 2-4, 2001, Pages 135-139

  Sutara F ^a   Tsud, N ^a   Veltruska K ^a   Matolin V ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Alloys; Coatings; Electron stimulated desorption (ESD); Getters; NEG; Titanium; Vanadium; X ray photoelectron spectroscopy; Zirconium

Indexed keywords

CARBON; CARBON MONOXIDE; CHEMISORPTION; DESORPTION; DISSOCIATION; FILM PREPARATION; GAS ADSORPTION; GETTERS; HYDROGEN; MAGNETRON SPUTTERING; MASS SPECTROMETERS; OXYGEN; STAINLESS STEEL; TITANIUM ALLOYS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON STIMULATED DESORPTION (ESD); NONEVAPORABLE GETTERS (NEG);

METALLIC FILMS;

EID: 0035858664     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(00)00469-3     Document Type: Conference Paper

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