Lowering the activation temperature of TiZrV non-evaporable getter films

Vacuum

Volumn 60, Issue 1-2, 2001, Pages 35-41

  Prodromides, A E ^a   Scheuerlein, C ^a   Taborelli, M ^a  

^a CERN   (Switzerland)

Author keywords

Activation; Getter; NEG; Ternary; Thin film; Titanium alloy; Vanadium alloy; Zirconium alloy

Indexed keywords

CATHODES; COMPOSITION EFFECTS; CRYSTAL STRUCTURE; GETTERS; MAGNETRON SPUTTERING; MORPHOLOGY; STAINLESS STEEL; SURFACE STRUCTURE; TERNARY SYSTEMS; THERMAL CYCLING; THIN FILMS; TITANIUM ALLOYS;

NONEVAPORABLE GETTER FILMS (NEG);

METALLIC FILMS;

EID: 0035149441     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00243-8     Document Type: Article

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