XPS analysis of the activation process in non-evaporable getter thin films

Surface and Interface Analysis

Volumn 30, Issue 1, 2000, Pages 623-627

  Lozano, M P ^a   Fraxedas, J ^b  

^a CERN   (Switzerland)

^b INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ACTIVATION; HEAT TREATMENT; SPUTTER DEPOSITION; THIN FILMS; TITANIUM ALLOYS; X RAY PHOTOELECTRON SPECTROSCOPY;

NON EVAPORABLE GETTERS; SURFACE ACTIVATION;

GETTERS;

EID: 0034245007     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200008)30:1<623::AID-SIA719>3.0.CO;2-Y     Document Type: Article

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