Influence of the elemental composition and crystal structure on the vacuum properties of Ti-Zr-V nonevaporable getter films

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 6, 2001, Pages 2925-2930

  Benvenuti, C ^a   Chiggiato, P ^a   Mongelluzzo, A ^a   Prodromides, A ^a   Ruzinov, V ^a   Scheuerlein, C ^a   Taborelli, M ^a   Levy F ^b  

^a CERN   (Switzerland)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPOSITION; CRYSTAL STRUCTURE; GETTERS; GRAIN SIZE AND SHAPE; HEAT TREATMENT; MAGNETRON SPUTTERING; X RAY DIFFRACTION ANALYSIS;

NONEVAPORABLE GETTERS;

THIN FILMS;

EID: 0035507474     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1414122     Document Type: Article

References (16)