Static SIMS study of Ti, Zr, V and Ti-Zr-V NEG activation

Vacuum

Volumn 71, Issue 1-2 SPEC., 2003, Pages 323-327

  Drbohlav, J ^a   Matolin, V ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Alloy; Coating; Getter; NEG; Static SIMS; Titanium; Vanadium; Zirconium

Indexed keywords

COATINGS; MAGNETRON SPUTTERING; SECONDARY ION MASS SPECTROMETRY; TITANIUM; VANADIUM; ZIRCONIUM;

NON-EVAPORABLE GETTERS (NEG);

GETTERS;

EID: 0037427427     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00757-1     Document Type: Conference Paper

References (23)

1. Benvenuti C., Chiggiato P., Cicoira F., Ruzinov V. Vacuum. 50:1998;57.
2. della Porta P. Vacuum. 47:1996;771.
3. Caloi R M., Carreti C. J Vac Sci Technol A. 16(3):1998;1991.
4. Pozzo A., Boffito C., Mazza F. Vacuum. 47:1996;783.
5. Li Y., Hess D., Kersevan R., Mistry N. J Vac Sci Technol A. 16(3):1998;1139.
6. Giannantonio R., Succi M., Solcia C. J Vac Sci Technol A. 15(1):1997;187.
7. Giannantonio R., Manini P., Mazza F., Dominoni D. J Vac Sci Technol A. 17(4):1999;2093.
8. Wang D.J., Chen J.R., Liu Y C. J Vac Sci Technol A. 14(4):1996;2624.
9. Benvenuti C., Chiggiato P. J Vac Sci Technol A. 14(6):1996;3278.
10. Benvenuti C., Cazeneuve J.M., Chiggiato P., Cicoira F., Escuderio Santana A., Johanek V., Ruzinov V., Fraxedas J. Vacuum. 53:1999;219.
11. Prodomides A.E., Scheuerlein C., Taborelli M. Vacuum. 60:2001;35.
12. Henrist B., Hilleret N., Scheuerlein C., Taborelli M. Appl Surf Sci. 172:2001;95.
13. Lozano M.P., Fraxedas J. Surf Interface Anal. 30:2000;623.
14. Sutara F., Tsud N., Veltruska K., Matolin V. Vacuum. 61:2001;135.
15. Benvenuti C., Chiggiato P., Cicoira F., L'Aminot Y. J Vac Sci Technol A. 16(1):1998;148.
16. Brown A., Vickerman J.C. Surf Sci. 124:1983;267.
17. Brown A., Vickerman J.C. Surf Sci. 151:1985;319.
18. Matolin V., Gillet E., Reed N.M., Vickerman J.J. Chem Soc Faraday Trans. 86(15):1990;2749.
19. Matolin V., Rebholz M., Kruse N. Surf Sci. 245:1991;233.
20. Henderson M.A. Surf Sci Lett. 343:1995;L1156.
21. Hardeveld R.M., Santen R.A., Niemantsverdriet J.W. Surf Sci. 369:1996;23.
22. Benvenuti C., Chiggiato, Mongelluzzo A., Prodromides A., Ruzinov V., Scheuerlein C., Taborelli M.J. Vac Sci Technol A. 19(6):2001;2925-2930.
23. Matolín V., Johánek V. Vacuum. 67:2001;177.