Reactive filtered arc evaporation

Vacuum

Volumn 60, Issue 3, 2001, Pages 361-368

  Mustapha, N M ^a   Howson, R P ^b  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^b LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

Filtered arc; Optical coatings; Reactive evaporation

Indexed keywords

ADHESION; ALUMINUM; DEPOSITION; ELECTROSTATICS; EVAPORATION; LIGHT REFLECTION; MAGNETIC FIELD EFFECTS; PLASMA APPLICATIONS; REFRACTIVE INDEX; TITANIUM; TITANIUM NITRIDE; VACUUM DEPOSITED COATINGS;

CATHODIC FILTERED ARC EVAPORATION;

OPTICAL COATINGS;

EID: 0034818416     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00425-5     Document Type: Article

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