Chromium nitride/niobium nitride superlattice coatings deposited by combined cathodic-arc/unbalanced magnetron technique

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 727-734

  Hovsepian, P E ^a   Lewis, D B ^a   Muunz W D ^a   Rouzaud, A ^b   Juliet, P ^b  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

^b CEA GRENOBLE   (France)

Author keywords

Adhesion; Cathodic arc unbalanced magnetron; Chromium nitride; Composition; Hardness; Niobium nitride

Indexed keywords

CHROMIUM COMPOUNDS; DIFFUSION IN SOLIDS; HARDNESS; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; SPUTTER DEPOSITION; STOICHIOMETRY; SUPERLATTICES;

CHROMIUM NITRIDE; NIOBIUM NITRIDE; PHYSICAL VAPOR DEPOSITION (PVD); SUPERLATTICE COATINGS;

VAPOR DEPOSITION;

ADHESION; CERAMIC COATING; HARDNESS; VAPOR DEPOSITION;

EID: 19244370924     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00182-6     Document Type: Conference Paper

References (19)

1. Hurkmans T., Lewis D.B., Brooks J.S., Münz W.-D. Surf. Coat. Technol. 86-87:1996;192-199.
2. Navinsek B., Panjan P. Surf. Coat. Technol. 59:1993;244-248.
3. Aubert A., Danroc J., Gaucher A., Terrat J.P. Thin Solid Films. 126:1985;61-67.
4. Helmersson U., Todorova S., Barnett S.A., Sundgren J.-E., Markert L.C., Greene G.E. J. Appl. Phys. 62:1987;481.
5. Koehler J.S. Phys. Rev. B. 2:1970;547.
6. Lehoczky S.L. J. Appl. Phys. 49:1978;5479.
7. Jankovwski A.F., Tsakalakos T. J. Phys. F: Met. Phys. 15:1985;1279.
8. Jankovwski A.F., Tsakalakos T. Annu. Rev. Mater. Sci. 16:1986;293.
9. Schinn M., Hultman L., Barnett S.A. J. Mater. Res. 7:1992;901.
10. Chu X., Barnett S.A., Wong M.S., Sproul W.D. Surf. Coat. Technol. 57:1993;13.
11. Setoyama M., Nakayama A., Tanaka M., Katagawa N., Nomura T. Surf. Coat.Technol. 86-87:1996;225-230.
12. Barnett S., Madan A. Physics World. 1:1998;45-48.
13. Münz W.-D., Schulze D., Hauzer F. Surf. Coat. Technol. 50:1992;169.
14. Münz W.-D., Vannisselroy K., Titema R., Hurkmans T., Keiren G. Surf. Coat. Technol. 58:1993;205.
15. Donohue L.A., Münz W.-D., Lewis D.B., Cawley J., Hurkmans T., Trinh T., Petrov I., Greene J.E. Surf. Coat. Technol. 93:1997;69-87.
16. Münz W.-D., Smith I.J., Lewis D.B., Creasey S. Vacuum. 48:(5):1997;473.
17. Creasey S., Lewis D.B., Smith I.J., Münz W.-D. Surf. Coat. Technol. 97:1997;163.
18. Rickerby D.S., Jones A.M., Bellamy B.A. Surf. Coat. Technol. 37:1989;111.
19. Rutherford K.L., Hutchings I.M. Surf. Coat. Technol. 79:1996;231-239.