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Plasma Processes and Polymers

Volumn 2, Issue 7, 2005, Pages 554-562

Influence of non-polymerizable gases added during plasma polymerization

(2) Hegemann, Dirk a Hossain, Mohammad Mokbul a

a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY (Switzerland)

Author keywords

Activation energy; Deposition rate; Etching; Plasma polymerization; Reaction parameter

Indexed keywords

ACTIVATION ENERGY; DEPOSITION; ETCHING; INERT GASES; MONOMERS; REACTION KINETICS;

DEPOSITION RATE; REACTION PARAMETER;

PLASMA POLYMERIZATION;

EID: 24344463076 PISSN: 16128850 EISSN: None Source Type: Journal
DOI: 10.1002/ppap.200500041 Document Type: Article

Times cited : (74)

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