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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 1, 2005, Pages 5-11

Design of functional coatings

(3) Hegemann, D a Oehr, C b Fischer, A a

a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY (Switzerland)

b FRAUNHOFER INSTITUTE FOR INTERFACIAL ENGINEERING AND BIOTECHNOLOGY IGB (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; DEPOSITION; PLASMA APPLICATIONS; POLYMERIZATION; REACTION KINETICS;

MACROSCOPIC KINETICS; PLASMA REACTORS;

COATINGS;

EID: 19544376934 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1814107 Document Type: Article

Times cited : (41)

References (50)

1
- 31144472294
- edited by R.d'Agostino, P.Favia, and F.Fracassi (Kluwer, Dordrecht
- F. Fracassi, in Plasma Processing of Polymers, edited by, R. d'Agostino, P. Favia, and, F. Fracassi, (Kluwer, Dordrecht, 1997), p. 47.
- (1997) Plasma Processing of Polymers , pp. 47
- Fracassi, F.¹

2
- 0003400638
- Wiley, New York
- B. Chapman, Glow Discharge Processes (Wiley, New York, 1980), p. 155.
- (1980) Glow Discharge Processes , pp. 155
- Chapman, B.¹

3
- 0027683085
- M. Moisan and M. R. Wertheimer, Surf. Coat. Technol. 59, 1 (1993).
- (1993) Surf. Coat. Technol. , vol.59 , pp. 1
- Moisan, M.¹ Wertheimer, M.R.²

4
- 31144456326
- Proc. 16th Int. Symp. Plasma Chem., 22-27 June
- M. A. Lieberman, Proc. 16th Int. Symp. Plasma Chem., 22-27 June 2003, Taormina, Italy.
- (2003)
- Lieberman, M.A.¹

5
- 36449001969
- P. J. Hargis Jr., K. E. Greenberg, P. A. Miller, J. B. Gerardo, J. R. Torczynski, M. E. Riley, G. A. Hebner, J. R. Roberts, J. K. Olthoff, J. R. Whetstone, R. J. Van Brunt, M. A. Sobolewski, H. M. Anderson, M. P. Splichal, J. L. Mock, P. Bletzinger, A. Garscadden, R. A. Gottscho, G. Selwyn, M. Dalvie, J. E. Heidenreich, J. W. Butterbaugh, M. L. Brake, M. L. Passow, J. Pender, A. Lujan, M. E. Elta, D. B. Graves, H. H. Sawin, M. J. Kushner, J. T. Verdeyen, R. Horwath, and T. R. Turner, Rev. Sci. Instrum. 65, 140 (1994).
- (1994) Rev. Sci. Instrum. , vol.65 , pp. 140
- Hargis Jr., P.J.¹ Greenberg, K.E.² Miller, P.A.³ Gerardo, J.B.⁴ Torczynski, J.R.⁵ Riley, M.E.⁶ Hebner, G.A.⁷ Roberts, J.R.⁸ Olthoff, J.K.⁹ Whetstone, J.R.¹⁰ Van Brunt, R.J.¹¹ Sobolewski, M.A.¹² Anderson, H.M.¹³ Splichal, M.P.¹⁴ Mock, J.L.¹⁵ Bletzinger, P.¹⁶ Garscadden, A.¹⁷ Gottscho, R.A.¹⁸ Selwyn, G.¹⁹ Dalvie, M.²⁰ more..

6
- 31144441815
- IOP, Bristol
- J. R. Roth, Industrial Plasma Engineering (IOP, Bristol, 1995), Vol. 1, p. 443.
- (1995) Industrial Plasma Engineering , vol.1 , pp. 443
- Roth, J.R.¹

7
- 0032206416
- F. A. Haas, A. Goodyear, and N. S. J. Braithwaite, Plasma Sources Sci. Technol. 7, 471 (1998).
- (1998) Plasma Sources Sci. Technol. , vol.7 , pp. 471
- Haas, F.A.¹ Goodyear, A.² Braithwaite, N.S.J.³

8
- 36549100807
- K. Köhler, J. W. Coburn, D. E. Horne, E. Kay, and J. H. Keller, J. Appl. Phys. 57, 59 (1985).
- (1985) J. Appl. Phys. , vol.57 , pp. 59
- Köhler, K.¹ Coburn, J.W.² Horne, D.E.³ Kay, E.⁴ Keller, J.H.⁵

9
- 0033751536
- L. Sansonnens, A. A. Howling, and C. Hollenstein, Plasma Sources Sci. Technol. 9, 205 (2000).
- (2000) Plasma Sources Sci. Technol. , vol.9 , pp. 205
- Sansonnens, L.¹ Howling, A.A.² Hollenstein, C.³

10
- 36449004205
- P. A. Miller, H. Anderson, and M. P. Splichal, J. Appl. Phys. 71, 1171 (1992).
- (1992) J. Appl. Phys. , vol.71 , pp. 1171
- Miller, P.A.¹ Anderson, H.² Splichal, M.P.³

11
- 0001760631
- A. Rutscher and H.-E. Wagner, Plasma Sources Sci. Technol. 2, 279 (1993).
- (1993) Plasma Sources Sci. Technol. , vol.2 , pp. 279
- Rutscher, A.¹ Wagner, H.-E.²

12
- 0003225316
- edited by R.d'Agostino (Academic, Boston
- N. Morosoff, in Plasma Deposition, Treatment, and Etching of Polymers, edited by, R. d'Agostino, (Academic, Boston, 1990), p. 1.
- (1990) Plasma Deposition, Treatment, and Etching of Polymers , pp. 1
- Morosoff, N.¹

13
- 0003872157
- Elsevier, Amsterdam
- H. Biederman and Y. Osada, Plasma Polymerization Processes (Elsevier, Amsterdam, 1992).
- (1992) Plasma Polymerization Processes
- Biederman, H.¹ Osada, Y.²

14
- 0017959408
- H. Yasuda and T. Hirotsu, J. Polym. Sci., Polym. Chem. Ed. 16, 743 (1978).
- (1978) J. Polym. Sci., Polym. Chem. Ed. , vol.16 , pp. 743
- Yasuda, H.¹ Hirotsu, T.²

15
- 0003077953
- Y.-S. Yeh, I.-N. Shyy, and H. Yasuda, J. Appl. Polym. Sci., Appl. Polym. Symp. 42, 1 (1988).
- (1988) J. Appl. Polym. Sci., Appl. Polym. Symp. , vol.42 , pp. 1
- Yeh, Y.-S.¹ Shyy, I.-N.² Yasuda, H.³

16
- 0344339153
- M. T. Kim, Thin Solid Films 347, 99 (1999).
- (1999) Thin Solid Films , vol.347 , pp. 99
- Kim, M.T.¹

17
- 0041326580
- G. F. Leu, A. Brockhaus, and J. Engemann, Surf. Coat. Technol. 174, 928 (2003).
- (2003) Surf. Coat. Technol. , vol.174 , pp. 928
- Leu, G.F.¹ Brockhaus, A.² Engemann, J.³

18
- 0021618575
- M. Gazicki, A. M. Wrobel, and M. Kryszewski, J. Appl. Polym. Sci., Appl. Polym. Symp. 38, 1 (1984).
- (1984) J. Appl. Polym. Sci., Appl. Polym. Symp. , vol.38 , pp. 1
- Gazicki, M.¹ Wrobel, A.M.² Kryszewski, M.³

19
- 0030494357
- S. M. Han and E. S. Aydil, J. Vac. Sci. Technol. A 14, 2062 (1996).
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 2062
- Han, S.M.¹ Aydil, E.S.²

20
- 0002713641
- S. Y. Park and N. Kim, J. Appl. Polym. Sci., Appl. Polym. Symp. 46, 91 (1990).
- (1990) J. Appl. Polym. Sci., Appl. Polym. Symp. , vol.46 , pp. 91
- Park, S.Y.¹ Kim, N.²

21
- 0031346359
- M. R. Alexander, F. R. Jones, and R. D. Short, Plasm. Polym. 2, 277 (1997).
- (1997) Plasm. Polym. , vol.2 , pp. 277
- Alexander, M.R.¹ Jones, F.R.² Short, R.D.³

22
- 0031344807
- M. T. Kim, Thin Solid Films 311, 157 (1997).
- (1997) Thin Solid Films , vol.311 , pp. 157
- Kim, M.T.¹

23
- 31144443378
- Proc. 14th Int. Symp. Plasma Chem.
- L. Zajickova, V. Bursikova, and J. Janca, Proc. 14th Int. Symp. Plasma Chem., 1439 (1999).
- (1999) , pp. 1439
- Zajickova, L.¹ Bursikova, V.² Janca, J.³

24
- 0000765055
- V. Shogun, A. Tyablikov, S. Schreiter, W. Scharff, T. Wallendorf, and S. Marke, Surf. Coat. Technol. 98, 1382 (1998).
- (1998) Surf. Coat. Technol. , vol.98 , pp. 1382
- Shogun, V.¹ Tyablikov, A.² Schreiter, S.³ Scharff, W.⁴ Wallendorf, T.⁵ Marke, S.⁶

25
- 0032142030
- R. Mahlberg, H. E.-M. Niemi, F. Denes, and R. M. Rowell, Int. J. Adhes. Adhes. 18, 283 (1998).
- (1998) Int. J. Adhes. Adhes. , vol.18 , pp. 283
- Mahlberg, R.¹ Niemi, H.E.-M.² Denes, F.³ Rowell, R.M.⁴

26
- 0032790931
- T. R. Gengenbach and H. J. Griesser, Polymer 40, 5079 (1999).
- (1999) Polymer , vol.40 , pp. 5079
- Gengenbach, T.R.¹ Griesser, H.J.²

27
- 0035978981
- J. Fang, H. Chen, and X. Yu, J. Appl. Polym. Sci. 80, 1434 (2001).
- (2001) J. Appl. Polym. Sci. , vol.80 , pp. 1434
- Fang, J.¹ Chen, H.² Yu, X.³

28
- 0242311387
- G. Dennler, A. Houdayer, P. Raynaud, I. Śguy, Y. Śgui, and M. R. Wertheimer, Plasm. Polym. 8, 43 (2003).
- (2003) Plasm. Polym. , vol.8 , pp. 43
- Dennler, G.¹ Houdayer, A.² Raynaud, P.³ Śguy, I.⁴ Śgui, Y.⁵ Wertheimer, M.R.⁶

29
- 0037454451
- D. Theirich, C. Soll, F. Leu, and J. Engemann, Vacuum 71, 349 (2003).
- (2003) Vacuum , vol.71 , pp. 349
- Theirich, D.¹ Soll, C.² Leu, F.³ Engemann, J.⁴

30
- 0342501973
- F. Benitez, E. Martinez, and J. Esteve, Thin Solid Films 377, 109 (2000).
- (2000) Thin Solid Films , vol.377 , pp. 109
- Benitez, F.¹ Martinez, E.² Esteve, J.³

31
- 0035782653
- D. Hegemann, H. Brunner, and C. Oehr, Plasm. Polym. 6, 221 (2001).
- (2001) Plasm. Polym. , vol.6 , pp. 221
- Hegemann, D.¹ Brunner, H.² Oehr, C.³

32
- 31144473032
- Proc. 45th SVC Ann. Tech. Conf.
- D. Hegemann, H. Brunner, and C. Oehr, Proc. 45th SVC Ann. Tech. Conf., 174 (2002).
- (2002) , pp. 174
- Hegemann, D.¹ Brunner, H.² Oehr, C.³

33
- 0034352013
- W. Michaeli, I. Fonteiner, and S. Goebel, Macromol. Mater. Eng.. 284, 30 (2000).
- (2000) Macromol. Mater. Eng. , vol.284 , pp. 30
- Michaeli, W.¹ Fonteiner, I.² Goebel, S.³

34
- 0034310550
- O. Zywitzki, H. Sahm, M. Krug, H. Morgner, and M. Neumann, Surf. Coat. Technol. 133, 555 (2000).
- (2000) Surf. Coat. Technol. , vol.133 , pp. 555
- Zywitzki, O.¹ Sahm, H.² Krug, M.³ Morgner, H.⁴ Neumann, M.⁵

35
- 0035386402
- B. Janocha, D. Hegemann, C. Oehr, H. Brunner, F. Rupp, and J. Geis-Gerstorfer, Surf. Coat. Technol. 142, 1051 (2001).
- (2001) Surf. Coat. Technol. , vol.142 , pp. 1051
- Janocha, B.¹ Hegemann, D.² Oehr, C.³ Brunner, H.⁴ Rupp, F.⁵ Geis-Gerstorfer, J.⁶

36
- 0029361123
- J.-C. Lin and S. L. Cooper, Biomaterials 16, 1017 (1995).
- (1995) Biomaterials , vol.16 , pp. 1017
- Lin, J.-C.¹ Cooper, S.L.²

37
- 18344408460
- F. Fracassi, R. d'Agostino, F. Palumbo, E. Angelici, S. Grassini, and F. Rosalbino, Surf. Coat. Technol. 174, 107 (2003).
- (2003) Surf. Coat. Technol. , vol.174 , pp. 107
- Fracassi, F.¹ D'Agostino, R.² Palumbo, F.³ Angelici, E.⁴ Grassini, S.⁵ Rosalbino, F.⁶

38
- 0032339055
- A. S. da Silva Sobrinho, M. Latr̀che, G. Czeremuszkin, J. E. Klemberg-Sapieha, and M. R. Wertheimer, J. Vac. Sci. Technol. A 16, 3190 (1998).
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 3190
- Da Silva Sobrinho, A.S.¹ Latr̀che, M.² Czeremuszkin, G.³ Klemberg-Sapieha, J.E.⁴ Wertheimer, M.R.⁵

39
- 0035386106
- P. Favia, M. Creatore, F. Palombo, V. Colaprico, and R. d'Agostino, Surf. Coat. Technol. 142, 1 (2001).
- (2001) Surf. Coat. Technol. , vol.142 , pp. 1
- Favia, P.¹ Creatore, M.² Palombo, F.³ Colaprico, V.⁴ D'Agostino, R.⁵

40
- 0043194089
- D. Hegemann, H. Brunner, and C. Oehr, Surf. Coat. Technol. 174, 253 (2003).
- (2003) Surf. Coat. Technol. , vol.174 , pp. 253
- Hegemann, D.¹ Brunner, H.² Oehr, C.³

41
- 0033369240
- K. Li and J. Meichsner, Surf. Coat. Technol. 116, 841 (1999).
- (1999) Surf. Coat. Technol. , vol.116 , pp. 841
- Li, K.¹ Meichsner, J.²

42
- 0031247344
- S. Guo, R. Rochotzki, I. Lundström, and H. Arwin, Sens. Actuators B 44, 243 (1997).
- (1997) Sens. Actuators B , vol.44 , pp. 243
- Guo, S.¹ Rochotzki, R.² Lundström, I.³ Arwin, H.⁴

43
- 0033334779
- B. Elkin, J. Mayer, B. Schindler, and U. Vohrer, Surf. Coat. Technol. 116, 836 (1999).
- (1999) Surf. Coat. Technol. , vol.116 , pp. 836
- Elkin, B.¹ Mayer, J.² Schindler, B.³ Vohrer, U.⁴

44
- 0035386101
- D. Hegemann, H. Brunner, and C. Oehr, Surf. Coat. Technol. 142, 849 (2001).
- (2001) Surf. Coat. Technol. , vol.142 , pp. 849
- Hegemann, D.¹ Brunner, H.² Oehr, C.³

45
- 0033354825
- C. Oehr, M. Müller, B. Elkin, D. Hegemann, and U. Vohrer, Surf. Coat. Technol. 116, 25 (1999).
- (1999) Surf. Coat. Technol. , vol.116 , pp. 25
- Oehr, C.¹ Müller, M.² Elkin, B.³ Hegemann, D.⁴ Vohrer, U.⁵

46
- 31144470322
- Proc. 16th Int. Symp. Plasma Chem., 22-27 June
- V. Sciarratta, D. Hegemann, U. Vohrer, M. Müller, and C. Oehr, Proc. 16th Int. Symp. Plasma Chem., 22-27 June 2003, Taormina, Italy.
- (2003)
- Sciarratta, V.¹ Hegemann, D.² Vohrer, U.³ Müller, M.⁴ Oehr, C.⁵

47
- 8344249614
- edited by R.d'Agostino, M. R.Wertheimer, C.Oehr, and P.Favia (Wiley-VCH, Weinheim
- D. Hegemann, U. Schütz, and C. Oehr, in Plasma Processes and Polymers, edited by, R. d'Agostino, M. R. Wertheimer, C. Oehr, and, P. Favia, (Wiley-VCH, Weinheim, 2004).
- (2004) Plasma Processes and Polymers
- Hegemann, D.¹ Schütz, U.² Oehr, C.³

48
- 0032058331
- L. Zajickova, V. Bursikova, and J. Janca, Vacuum 50, 19 (1998).
- (1998) Vacuum , vol.50 , pp. 19
- Zajickova, L.¹ Bursikova, V.² Janca, J.³

49
- 0011176720
- S. Candan, A. J. Beck, L. O'Toole, and R. D. Short, J. Vac. Sci. Technol. A 16, 1702 (1998).
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 1702
- Candan, S.¹ Beck, A.J.² O'Toole, L.³ Short, R.D.⁴

50
- 21344448152
- U. Vohrer, D. Hegemann, and C. Oehr, Anal. Bioanal. Chem. 375, 929 (2003).
- (2003) Anal. Bioanal. Chem. , vol.375 , pp. 929
- Vohrer, U.¹ Hegemann, D.² Oehr, C.³

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