Novel bi-directional magnetic microactuator using electroplated permanent magnet arrays with vertical anisotropy

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 686-691

  Cho, Hyoung J ^a   Ahn, Chong H ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; COERCIVE FORCE; ELECTROPLATING; MAGNETIC ANISOTROPY; PERMANENT MAGNETS; REMANENCE;

BIDIRECTIONAL MAGNETIC MICROACTUATORS; ELECTROPLATED PERMANENT MAGNET ARRAYS;

MICROACTUATORS;

EID: 0033708594     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (15)