Imprinting of nanopores in organosilicate dielectric thin films with hyperbranched ketalized polyglycidol

Polymer

Volumn 46, Issue 18, 2005, Pages 7394-7402

  Kim, Jong Seong ^a   Kim, Hyun Chul ^a   Lee, Byeongdu ^a   Ree, Moonhor ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Low dielectric; Nanoporous dielectric film; Porogen

Indexed keywords

CATALYST ACTIVITY; COMPLEXATION; DIELECTRIC MATERIALS; NANOSTRUCTURED MATERIALS; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PERMITTIVITY; POLYMERIZATION; PYROLYSIS; REFRACTIVE INDEX; SYNCHROTRONS;

LOW DIELECTRIC; NANOPOROUS DIELECTRIC FILM; POLYGYLCIDOL (PG); POROGEN;

DIELECTRIC FILMS;

POLYMER SCIENCE;

EID: 23744454302     PISSN: 00323861     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.polymer.2005.06.024     Document Type: Article

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