Molecular templating of nanoporous ultralow dielectric constant (≈1.5) organosilicates by tailoring the microphase separation of triblock copolymers

Chemistry of Materials

Volumn 13, Issue 9, 2001, Pages 2762-2764

  Yang, S ^a   Mirau, P A ^a   Pai, C S ^a   Naiamasu, O ^a   Reichmanis, E ^a   Lin, E K ^b   Lee, H J ^b   Gidley, D W ^c   Sun, J ^c  

^a LUCENT TECHNOLOGIES   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPOLYMER; ETHYLENE OXIDE DERIVATIVE; ORGANOSILICON DERIVATIVE;

ARTICLE; CHEMICAL STRUCTURE; DIELECTRIC CONSTANT; MOLECULAR DYNAMICS; NANOPARTICLE; POROSITY; PROTON NUCLEAR MAGNETIC RESONANCE; THERMODYNAMICS;

EID: 0035199363     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm0102786     Document Type: Article

References (27)