Novel scanning technique for ultra-precise measurement of slope and topography of flats, aspheres and complex surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3739, Issue , 1999, Pages 274-282

  Weingaetner, Ingolf ^a   Schulz, Michael ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; DISTORTION (WAVES); OPTICAL RESOLVING POWER; PRECISION ENGINEERING; SCANNING;

PENTAGON PRISMS;

ASPHERICS;

EID: 0032646887     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)