Natural lithography of Si surfaces using localized anodization and subsequent chemical etching

Electrochemical and Solid-State Letters

Volumn 8, Issue 7, 2005, Pages

  Oide, Akihiko ^a   Asoh, Hidetaka ^a   Ono, Sachiko ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; DEPOSITION; ELECTROCHEMISTRY; ETCHING; LITHOGRAPHY; SOLUTIONS; SUBSTRATES; SURFACE TREATMENT;

CHEMICAL ETCHING; HOLE ARRAYS; NATURAL LITHOGRAPHY; SCANNING PROBE MICROSCOPES (SPM);

SEMICONDUCTING SILICON;

EID: 23244455346     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1923428     Document Type: Article

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