Anodization behavior of Al Film on Si substrate with different interlayers for preparing Si-based nanoporous alumina template

Journal of Materials Research

Volumn 19, Issue 3, 2004, Pages 888-895

  Wu, M T ^a   Leu, I C ^a   Hon, M H ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Electrochemical synthesis; Nanoscale; Template

Indexed keywords

ALUMINUM; COMPOSITE FILMS; FABRICATION; INTERFACES (MATERIALS); METALLIC FILMS; NANOSTRUCTURES; SILICON; SUBSTRATES; ALUMINUM FOIL; DISSOLUTION; FILM GROWTH; FILM PREPARATION; MULTILAYERS; NANOSTRUCTURED MATERIALS; POROUS MATERIALS;

ANODIZATIONS; ELECTROCHEMICAL SYNTHESIS; NANO SCALE; NANOPOROUS ALUMINA TEMPLATES; OXIDATION CURRENTS; POROUS ANODIC ALUMINA; SI SUBSTRATES; TEMPLATE; AL FILMS; SI-BASED;

ALUMINA; ANODIC OXIDATION;

INTERLAYER; POROUS ANODIC ALUMINA; TEMPLATE MEDIATED GROWTH;

EID: 1942519390     PISSN: 08842914     EISSN: 20445326     Source Type: Journal    
DOI: 10.1557/jmr.2004.19.3.888     Document Type: Article

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