Solvent-assisted polymer-bonding lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 1, 2005, Pages 236-241

  Luan, Shifang ^a   Xing, Rubo ^a   Wang, Zhe ^a   Yu, Xinhong ^a   Han, Yanchun ^a  

^a CHANGCHUN INSTITUTE OF APPLIED CHEMISTRY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; BONDING; ELASTOMERS; LOW TEMPERATURE EFFECTS; POLYMERS; SOLVENTS;

SOLVENT VAPORS; SURFACE ADHESION;

LITHOGRAPHY;

EID: 21444444436     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1852467     Document Type: Article

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