Low stressed high-aspect-ratio ultra-thick SU-8 UV-LIGA process for the fabrication of a micro heat exchanger

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5344, Issue , 2004, Pages 147-154

  Li, Bo ^a   Chen, Quanfang ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Adhesion; Cryo temperature; Electroforming; Micro heat exchanger; SU 8; UV LIGA

Indexed keywords

CRYO TEMPERATURE; MICRO HEAT EXCHANGERS; SU-8; UV-LIGA;

ADHESION; ASPECT RATIO; ELECTRODEPOSITION; ELECTROFORMING; HEAT EXCHANGERS; PHOTORESISTS; POLYMERS;

MICROELECTROMECHANICAL DEVICES;

EID: 2142815401     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524608     Document Type: Conference Paper

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