Fabrication of high-aspect-ratio microstructures on planar and nonplanar surfaces using a modified LIGA process

Journal of Microelectromechanical Systems

Volumn 6, Issue 4, 1997, Pages 329-336

  Marques, Christophe ^a,b   Desta, Yohannes M ^a,c   Rogers, James ^a,d   Murphy, Michael C ^a,e,f,g,h,i   Kelly, Kevin ^a,g,j,k,l  

^a LOUISIANA STATE UNIVERSITY   (United States)

^b Louisiana State University ^*  (France)

^c EMBRY RIDDLE AERONAUTICAL UNIVERSITY   (United States)

^d LOUISIANA TECH UNIVERSITY   (United States)

^e Department of Obstetrics Gynecology   (United States)

^f CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^g MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^h RAYTHEON COMPANY   (United States)

ⁱ KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^j DUKE UNIVERSITY   (United States)

^k DUKE ENERGY   (United States)

^l Louisiana State University   (United States)

more..

Author keywords

Electroforming; LIGA; Nonplanar electroforming

Indexed keywords

CONDUCTIVE MATERIALS; ELECTRODEPOSITION; FABRICATION; MICROMETERS; MICROSTRUCTURE; PLASTIC MOLDS; POLYMERS; SUBSTRATES; SURFACES;

ELECTROFORM MICROSTRUCTURE; HIGH ASPECT RATIO MICROSTRUCTURES;

ELECTROFORMING;

EID: 0031366377     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.650130     Document Type: Article

References (12)

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