Development of robust microvalves for large flow rate robust hydraulic actuators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 96-99

  Li, Bo ^a   Chen, Quanfang ^a   Lee, Dong Gun ^b   Woolman, Jason ^b   Carman, Greg P ^b  

^a University of Central Florida   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEM SYNTHESIS; FLOW MEASUREMENT; FLOW OF FLUIDS; HYDRAULIC CONTROL EQUIPMENT; NICKEL; PIEZOELECTRIC MATERIALS; PRESSURE; REACTIVE ION ETCHING; ROBUSTNESS (CONTROL SYSTEMS); SILICON WAFERS;

FLOW RATE; HYDRAULIC ACTUATOR; MICROVALVE;

MICROACTUATORS;

EID: 0037818339     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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