Robust microvalves for hydraulic actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4981, Issue , 2003, Pages 18-27

  Chen, Quanfang ^a   Li, Bo ^a   Gong, Jianwei ^a   Hu, Min ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Hydraulic Actuators; Large Flow Rate; Robust Microvalves

Indexed keywords

ELECTROFORMING; FABRICATION; FINITE ELEMENT METHOD; FLOW MEASUREMENT; HYDRAULIC EQUIPMENT; MICROACTUATORS; REACTIVE ION ETCHING; SILICON; SPACE APPLICATIONS; SUBSTRATES; VALVES (MECHANICAL);

HYDRAULIC ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038059096     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479560     Document Type: Conference Paper

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