Investigation of Adhesion During Operation of MEMS Cantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5343, Issue , 2004, Pages 215-226

  Ali, S Mubassar ^a,b   Phinney, Leslie M ^a,c  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Minnesota   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Adhesion; MEMS reliability; Pull off force; Stiction; Surface Micromachining

Indexed keywords

MEMS RELIABILITY; PULL OFF FORCE; STRAIN ENERGY; SURFACE MICROMACHINING;

ADHESION; CANTILEVER BEAMS; ELECTRIC POTENTIAL; HYSTERESIS; MICROMACHINING; POLYSILICON; STICTION; STRAIN;

MICROELECTROMECHANICAL DEVICES;

EID: 2142705411     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.532891     Document Type: Conference Paper

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