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Diamond and Related Materials

Volumn 14, Issue 9, 2005, Pages 1535-1542

Nanotribological and nanomechanical properties of 5-80 nm tetrahedral amorphous carbon films on silicon

(2) Beake, Ben D a Lau, S P b

a MICRO MATERIALS LTD (United Kingdom)

b NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

Coating; DLC; Fatigue; Fracture

Indexed keywords

COATINGS; DEFORMATION; DIAMOND LIKE CARBON FILMS; ELECTRIC ARCS; FATIGUE OF MATERIALS; FRACTURE; NANOTECHNOLOGY; SILICON; TRIBOLOGY;

CATHODIC VACUUM ARC METHOD; CRITICAL LOADS; FILM REMOVAL; SCRATCH TESTING;

AMORPHOUS FILMS;

EID: 21344474540 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2005.04.002 Document Type: Article

Times cited : (52)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.