The effects of hydrogenated carbon films with different film thickness and nitrogen content on specimen mechanical properties, scratch critical load, adhesion work and tribological behavior

Diamond and Related Materials

Volumn 13, Issue 10, 2004, Pages 1895-1906

  Lin, Jen Fin ^a   Wei, Chin Chung ^a   Yung, Yuan Kei ^a   Ai, Chi Fong ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b INSTITUTE OF NUCLEAR ENERGY RESEARCH   (Taiwan)

Author keywords

Adhesion work; Critical load; Film thickness and nitrogen content; Hydrogenated carbon films; Wear volume; Young's modulus

Indexed keywords

ADHESION; DEPOSITION; ELASTIC MODULI; HYDROGENATION; MECHANICAL PROPERTIES; NITROGEN; PLASTIC DEFORMATION; SILICON WAFERS; THICKNESS CONTROL; TRIBOLOGY; WEAR OF MATERIALS;

ADHESION WORK; CRITICAL LOAD; FILM THICKNESS AND NITROGEN CONTENT; HYDROGENATED CARBON FILMS; WEAR VOLUME;

DIAMOND LIKE CARBON FILMS;

EID: 9644282990     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.06.011     Document Type: Article

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