An empirical relation for critical load of DLC coatings prepared on silicon substrates

International Journal of Modern Physics B

Volumn 16, Issue 6-7, 2002, Pages 958-962

  Sheeja, D ^a   Tay, B K ^a   Lau, S P ^a   Leong, K W ^a   Lee, C H ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON;

ANALYTIC METHOD; COMPRESSION; CONFERENCE PAPER; FACTORIAL ANALYSIS; MATERIAL COATING; MECHANICAL STRESS; RAMAN SPECTROMETRY; STRUCTURE ANALYSIS; THICKNESS;

EID: 0037139067     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979202010671     Document Type: Conference Paper

References (6)

1. Mechanical and tribological properties of amorphous carbon films
2. Properties of carbon ion deposited tetrahedral amphorous carbon films as a function of ion energy
3. Structure internal stresses, adhesion & wear resistance of sputtered alumina coatings