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Volumn 16, Issue 6-7, 2002, Pages 958-962
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An empirical relation for critical load of DLC coatings prepared on silicon substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
SILICON;
ANALYTIC METHOD;
COMPRESSION;
CONFERENCE PAPER;
FACTORIAL ANALYSIS;
MATERIAL COATING;
MECHANICAL STRESS;
RAMAN SPECTROMETRY;
STRUCTURE ANALYSIS;
THICKNESS;
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EID: 0037139067
PISSN: 02179792
EISSN: None
Source Type: Journal
DOI: 10.1142/s0217979202010671 Document Type: Conference Paper |
Times cited : (6)
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References (6)
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