Comparison of deposition methods for ultra thin DLC overcoate films for MR head

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1017-1023

  Akita, N ^a   Konishi, Y ^a   Ogura, S ^a   Imamura, M ^a   Hu, Y H ^b   Shi, X ^b  

^a SHIMADZU CORPORATION   (Japan)

^b Nanofilm Technol Intl PTE Ltd   (Singapore)

Author keywords

Adhesion; Diamond like carbon; Photo electron spectroscopy; Tetrahedral amorphous carbon

Indexed keywords

ADHESION; CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; ELECTRON SPECTROSCOPY; GIANT MAGNETORESISTANCE; ION BEAM ASSISTED DEPOSITION; SPUTTERING;

MULTI-FILM DEPOSITION;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON;

EID: 0035270748     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00487-8     Document Type: Article

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