In situ measurement of stress during deposition of boron nitride films

Materials Science Forum

Volumn 347, Issue , 2000, Pages 156-160

  Fukarek, W ^a   Fitz, C ^a   Kolitsch, A ^a   Moller W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); DEPOSITION; ELLIPSOMETRY; FILM GROWTH; ION BEAMS; ION IMPLANTATION; SPECTROSCOPIC ANALYSIS; STRESS ANALYSIS; THIN FILMS;

BORON NITRIDE; ION BEAM ASSISTED DEFLECTION (IBAD); LASER DEFLECTION;

BORON COMPOUNDS;

EID: 0033666824     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/msf.347-349.156     Document Type: Article

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