Microreplication in a silicon processing compatible polymer material

Journal of Micromechanics and Microengineering

Volumn 15, Issue 7, 2005, Pages

  Melin, Jonas ^a   Hedsten, Karin ^b   Magnusson, Anders ^b   Karlén, David ^b   Rödjegård, Henrik ^c   Persson, Katrin ^c   Bengtsson, Jörgen ^b   Enoksson, Peter ^b   Nikolajeff, Fredrik ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^c Imego AB The Institute of Micro and Nanotechnology   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; FABRICATION; IMAGING SYSTEMS; LITHOGRAPHY; MICROOPTICS; OPACITY; POLYTETRAFLUOROETHYLENES; SILICON WAFERS; SPIN COATING;

DIFFRACTIVE LENSE; LENSE FABRICATION; NANOIMPRINT LITHOGRAPHY (NIL); SILICON PROCESSING;

MICROELECTROMECHANICAL DEVICES;

EID: 21044446582     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/7/017     Document Type: Article

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