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Volumn 103, Issue 1-2, 2003, Pages 109-115

An integrated micro-optical system for VCSEL-to-fiber active alignment

Author keywords

Alignment; Coupling efficiency; MEMS; Micromirror; Optical fiber; VCSEL

Indexed keywords

ETCHING; MICROOPTICS; OPTICAL FIBERS; SEMICONDUCTING SILICON;

EID: 0037439022     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00313-8     Document Type: Conference Paper
Times cited : (35)

References (10)
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    • (1996) J. Lightwave Techuol. , vol.14 , Issue.6 , pp. 1519-1523
    • Nakagawa, G.1    Miura, K.2    Sasaki, S.3    Yano, M.4
  • 6
    • 0033331170 scopus 로고    scopus 로고
    • Solder self-assembly for threedimensional microelectromechanical systems
    • K.F. Harsh, V.M. Bright, Y.C. Lee, Solder self-assembly for threedimensional microelectromechanical systems, Sensors and Actuators A 77 (1999) 237-244.
    • (1999) Sensors and Actuators A , vol.77 , pp. 237-244
    • Harsh, K.F.1    Bright, V.M.2    Lee, Y.C.3
  • 7
    • 0029535925 scopus 로고
    • Parallel optical link-PAROLI, a low cost 12-channel optical interconnection
    • H. Karstensen, Parallel optical link-PAROLI, a low cost 12-channel optical interconnection, in: Proceedings of the IEEE LEOS, 1995, pp. 226-227.
    • (1995) Proceedings of the IEEE LEOS , pp. 226-227
    • Karstensen, H.1
  • 10
    • 0033906907 scopus 로고    scopus 로고
    • The realization and design considerations of a flip-chip integrated MEMS tunable capacitor
    • K.F. Harsh, B. Su, W. Zhang, V.M. Bright, Y.C. Lee, The realization and design considerations of a flip-chip integrated MEMS tunable capacitor, Sensors and Actuators A 80 (2000) 108-118.
    • (2000) Sensors and Actuators A , vol.80 , pp. 108-118
    • Harsh, K.F.1    Su, B.2    Zhang, W.3    Bright, V.M.4    Lee, Y.C.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.