Thermal conductivity of ultra thin single crystal silicon layers, part I - Experimental mesuremnets at room and cryogenic temperatures

American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD

Volumn 375, Issue 2, 2004, Pages 273-280

  Liu, Wenjun ^a   Asheghi, Mehdi ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENICS; ELECTRIC RESISTANCE; PHONONS; RELIABILITY; SILICON; SILICON ON INSULATOR TECHNOLOGY; TEMPERATURE MEASUREMENT; THERMAL CONDUCTIVITY OF SOLIDS;

BOUNDARY SCATTERING; MICROFABRICATION; NANOCALORIMETERS; SILICON LAYERS;

SINGLE CRYSTALS;

EID: 20344382295     PISSN: 02725673     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-62105     Document Type: Conference Paper

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