Thermal conductivity of SOI device layers

IEEE International SOI Conference

Volumn , Issue , 1997, Pages 134-135

  Asheghi, Mehdi ^a   Ju, Y Sungtaek ^a   Goodson, Kenneth E ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT CONDUCTION; MATHEMATICAL MODELS; MOSFET DEVICES; PHONONS; TEMPERATURE MEASUREMENT; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EFFECTS; ULTRATHIN FILMS;

PHONON BOUNDARY SCATTERING;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0031353749     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)