Physical, structural and mechanical characterization of Ti1-xSixNy films

Surface and Coatings Technology

Volumn 108-109, Issue , 1998, Pages 236-240

  Vaz, F ^a   Rebouta, L ^a   Ramos, S ^b   Da Silva, M F ^c   Soares, J C ^d  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITY OF COIMBRA   (Portugal)

^c INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^d CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

Author keywords

Grain size; Hard coatings; Texture; Titanium and silicon nitride

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTRIC POTENTIAL; GRAIN SIZE AND SHAPE; HARDNESS TESTING; LATTICE CONSTANTS; MAGNETRON SPUTTERING; MICROHARDNESS; SILICON NITRIDE; TEXTURES; TITANIUM NITRIDE;

FOURIER ANALYSIS; HARD COATINGS; ULTRAMICROHARDNESS TESTING;

CERAMIC COATINGS;

EID: 0038832585     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00620-3     Document Type: Article

References (19)

1. M. Ohring, The Materials Science of Thin Films, Academic Press, San Diego, 1992, pp. 547-588.
2. A. Mattews, Protective coatings and thin films: synthesis, characterization and applications, in: Y. Pauleau, P. Barnas, BOOK TITLE NEEDED, Kluwer, Dordrecht, 1996, pp. 1-12.
3. Rickerby D.S., Burnett P.J. Thin Solid Films. 157:1988;195.
4. Senna L.F. Surf. Coat. Technol. 94 95:1997;390-397.
5. Pocdhet L.F., Howard P., Safaie S. Surf. Coat. Technol. 94 95:1997;70-75.
6. Veprek S., Reiprich S., Shizhi Li Appl. Phys. Lett. 66:1995;2640.
7. Veprek S., Reiprich S. Thin Solid Films. 268:1996;64.
8. Veprek S. Surf. Coat. Technol. 97:1997;15-22.
9. H. Bückle, in: J.W. Westbrook, H. Conrad (Eds.), The Science of Hardness Testing and Its Research Applications, American Society for Metals, OH, 1973, pp. 453-491.
10. Doerner M.F., Gardner D.S., Nix W.D. J. Mater. Res. 1:1987;845.
11. Sun Y., Bell T., Zheng S. Thin Solid Films. 258:1995;198.
12. Cai X., Bangert H. Thin Solid Films. 264:1995;59.
13. Pharr G.M., Oliver W.C. MRS Bull. 7:1992;28-33.
14. Mignot J., Rondot Acta Metall. 23:1975;1321.
15. Doerner M.F., Nix W.D. J. Mater. Res. 1(4):1986;601-609.
16. Sneddon I.N. Int. J. Eng. Sci. 3:1965;47-57.
17. Török E., Perry A.J., Chollet L., Sproul W.D. Thin Solid Films. 154:1987;37-43.
18. G. Simmons, H. Wang, Single Crystal Elastic Constants and Calculated Aggregate Properties: A Handbook, 2nd ed., MIT Press, Cambridge, MA, 1971.
19. Trindade A.C., Cavaleiro A., Fernandes J.V. J. Testing Evaluation. 22(4):1994;365.