Single ion implantation with scanning probe alignment

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 2992-2994

  Persaud, A ^a   Allen, F I ^a   Gicquel, F ^a   Park, S J ^a   Liddle, J A ^a   Schenkel, T ^a   Ivanov, Tzv ^b   Ivanova, K ^b   Rangelow, I W ^b   Bokor, J ^a,c  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF KASSEL   (Germany)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSED ION BEAMS (FIB); PRECOLLIMATORS; SCANNING FORCE MICROSCOPE; SINGLE ION IMPLANTATION;

DEPOSITION; ELECTRON BEAMS; ION BEAMS; LIGHT TRANSMISSION; MICROSCOPES; OPTICAL COLLIMATORS; PHOTOMULTIPLIERS; PROBES; SILICON NITRIDE; THIN FILMS;

ION IMPLANTATION;

EID: 19944433204     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1802891     Document Type: Conference Paper

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