Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 200-205

  Schenkel, T ^a   Rangelow, I W ^a,d   Keller, R ^a   Park, S J ^a   Nilsson, J ^b   Persaud, A ^a   Radmilovic, V R ^a   Grabiec, P ^a,e   Schneider, D H ^b   Liddle, J A ^a   Bokor, J ^a,c  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d UNIVERSITY OF KASSEL   (Germany)

^e ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ATOMIC PHYSICS; CHARGE TRANSFER; DATA REDUCTION; DEPOSITION; DOPING (ADDITIVES); ION SOURCES; NANOSTRUCTURED MATERIALS; POTENTIAL ENERGY; SILICON WAFERS; SPUTTERING;

ELECTRON SPUTTERING; IMPACT ENERGY; ION DETECTION; ION INTERACTION;

ION IMPLANTATION;

EID: 13244253060     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.054     Document Type: Conference Paper

References (26)

1. Schenkel T., Hamza A.V., Barnes A.V., Schneider D.H. Prog. Surf. Sci. 61:1999;23.
2. Arnau A., Aumayr F., Echenique P.M., Grether M., Heiland W., Limburg J., Morgenstern R., Roncin P., Schippers S., Schuch R., Stolterfoht N., Varga P., Zouros T.J.M., Winter H.P. Surf. Sci. Rep. 27:1997;117.
3. Winter H.P., Aumayr F. Phys. Scr. T. 92:2001;12.
4. Schenkel T., Newman M.W., Niedermayr T.R., Machicoane G.A., McDonald J.W., Barnes A.V., Hamza A.V., Banks J.C., Doyle B.L., Wu K.J. Nucl. Instr. and Meth. B. 161-163:2000;65.
5. Schenkel T., Persaud A., Park S.J., Meijer J., Kinglsey J.R., McDonald J.W., Holder J.P., Bokor J., Schneider D.H. J. Vac. Sci. Technol. B. 20:2002;2819.
6. Kane B.E. Nature. 393:1998;133 Skinner A.J., Davenport M.E., Kane B.E. Phys. Rev. Lett. 90:2003;087901.
7. Kane B.E. Nature. 393:1998;133 Skinner A.J., Davenport M.E., Kane B.E. Phys. Rev. Lett. 90:2003;087901.
8. Sporn M., Libiseller G., Neidhart T., Schmid M., Aumayr F., Winter H.P., Varga P., Grether M., Niemann D., Stolterfoht N. Phys. Rev. Lett. 79:1997;945.
9. Schenkel T., Hamza A.V., Newman M.W., Machicoane G.A., McDonald J.W., Schneider D.H., Wu K.J., Liechtenstein V.Kh. Phys. Scr. T. 92:2001;208 Schenkel T., Briere M.A., Barnes A.V., Hamza A., Bethge K., Schmidt-Böcking H., Schneider D.H. Phys. Rev. Lett. 79:1997;2030.
10. Schenkel T., Hamza A.V., Newman M.W., Machicoane G.A., McDonald J.W., Schneider D.H., Wu K.J., Liechtenstein V.Kh. Phys. Scr. T. 92:2001;208 Schenkel T., Briere M.A., Barnes A.V., Hamza A., Bethge K., Schmidt-Böcking H., Schneider D.H. Phys. Rev. Lett. 79:1997;2030.
11. Schenkel T., Persaud A., Park S.J., Nilsson J., Bokor J., Liddle J.A., Keller R., Schneider D.H., Cheng D.W., Humphries D.E. J. Appl. Phys. 94:2003;7017 S.-J. Park, A. Persaud, J.A. Liddle, J. Nilsson, J. Bokor, D.H. Schneider, I. Rangelow, T. Schenkel, ( www.arXiv.org ), cond-mat/0310195.
12. Schenkel T., Persaud A., Park S.J., Nilsson J., Bokor J., Liddle J.A., Keller R., Schneider D.H., Cheng D.W., Humphries D.E. J. Appl. Phys. 94:2003;7017 S.-J. Park, A. Persaud, J.A. Liddle, J. Nilsson, J. Bokor, D.H. Schneider, I. Rangelow, T. Schenkel, ( www.arXiv.org ), cond-mat/0310195.
13. M.A. Briere, J.P. Biersack, D.H. Schneider, LLNL-EBIT, Annual Report, 1993, UCRL-ID-118274 (unpublished) P. 33 Biersack J.P. Nucl. Instr. and Meth. B. 80-81:1993;12.
14. M.A. Briere, J.P. Biersack, D.H. Schneider, LLNL-EBIT, Annual Report, 1993, UCRL-ID-118274 (unpublished) P. 33 Biersack J.P. Nucl. Instr. and Meth. B. 80-81:1993;12.
15. Nielson M.A., Chuang I.L. Quantum Computation. 2000;University Press, Cambridge. see also the recently published roadmap for quantum information science and technology under: http://qist.lanl.gov/.
16. Rangelow I.W., Voigt J., Edinger K. J. Vac. Sci. Technol. B. 16:2001;2723 Lüthi R., Schlittler R.R., Brugger J., Vettiger P., Welland M.E., Gimzewski J.K. Appl. Phys. Lett. 75:1999;1314 R.G. Clark, unpublished.
17. Rangelow I.W., Voigt J., Edinger K. J. Vac. Sci. Technol. B. 16:2001;2723 Lüthi R., Schlittler R.R., Brugger J., Vettiger P., Welland M.E., Gimzewski J.K. Appl. Phys. Lett. 75:1999;1314 R.G. Clark, unpublished.
18. Rangelow I.W., Voigt J., Edinger K. J. Vac. Sci. Technol. B. 16:2001;2723 Lüthi R., Schlittler R.R., Brugger J., Vettiger P., Welland M.E., Gimzewski J.K. Appl. Phys. Lett. 75:1999;1314 R.G. Clark, unpublished.
19. Schenkel T., Persaud A., Kraemer A., McDonald J.W., Holder J.P., Hamza A.V., Schneider D.H. Rev. Sci. Instr. 73:2002;663.
20. Pedrak R., Ivanov Tzv., Ivanova K., Gotszalk T., Abedinov N., Rangelow I.W., Edinger K., Tomero E., Schenkel T., Hudek P. J. Vac. Sci. Technol. B. 21:2003;3102.
21. Schenkel T., Stach E.A., Radmilovic V., Park S.-J., Persaud A. J. Vac. Sci. Technol. B. 21:2003;2720.
22. Electronic sputtering of some metals by swift heavy ions was recently reported by Mieskes H.D., Assmann W., Grüner F., Kucal H., Wang Z.G., Toulemonde M. Phys. Rev. B. 67:2003;155414.
23. Li J., Stein D., McMullan C., Branton D., Aziz M.J., Golovchenko J.A. Nature. 412:2001;166.
24. Ninomiya S., Yamazaki Y., Koike F., Masuda H., Azuma T., Komaki K., Kuroki K., Sekiguchi M., et al. Phys. Rev. Lett. 78:1997;4557.
25. Stolterfoht N., Bremer J.-H., Hoffmann V., Hellhammer R., Fink D., Petrov A., Sulik B. Phys. Rev. Lett. 88:2002;133201.
26. Tökési K., Wirtz L., Lemell C., Burgdörfer J. Phys. Rev. A. 61:2000;020901R.